发明申请
- 专利标题: SEMICONDUCTOR PACKAGE WITHOUT CHIP CARRIER AND FABRICATION METHOD THEREOF
- 专利标题(中): 无芯片载体的半导体封装及其制造方法
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申请号: US12967839申请日: 2010-12-14
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公开(公告)号: US20120007234A1公开(公告)日: 2012-01-12
- 发明人: Yueh-Ying Tsai , Fu-Di Tang , Chien-Ping Huang , Chun-Chi Ke
- 申请人: Yueh-Ying Tsai , Fu-Di Tang , Chien-Ping Huang , Chun-Chi Ke
- 申请人地址: TW Taichung
- 专利权人: SILICONWARE PRECISION INDUSTRIES CO., LTD.
- 当前专利权人: SILICONWARE PRECISION INDUSTRIES CO., LTD.
- 当前专利权人地址: TW Taichung
- 优先权: TW099122791 20100712
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L21/56
摘要:
A semiconductor package without a chip carrier formed thereon and a fabrication method thereof. A metallic carrier is half-etched to form a plurality of grooves and metal studs corresponding to the grooves. The grooves are filled with a first encapsulant and a plurality of bonding pads are formed on the metal studs. The first encapsulant is bonded with the metal studs directly. Each of the bonding pads and one of the metal studs corresponding to the bonding pad form a T-shaped structure. Therefore, bonding force between the metal studs and the first encapsulant is enhanced such that delamination is avoided. Die mounting, wire-bonding and molding processes are performed subsequently. Since the half-etched grooves are filled with the first encapsulant, the drawback of having pliable metallic carrier that makes transportation difficult to carry out as encountered in prior techniques is overcome, and the manufacturing cost is educed by not requiring the use of costly metals as an etching resist layer.
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