Invention Application
- Patent Title: Contrast for Scanning Confocal Electron Microscope
- Patent Title (中): 扫描共焦电子显微镜对比
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Application No.: US13182992Application Date: 2011-07-14
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Publication No.: US20120012747A1Publication Date: 2012-01-19
- Inventor: Sorin Lazar , Bert Henning Freitag , Peter Christiaan Tiemeijer
- Applicant: Sorin Lazar , Bert Henning Freitag , Peter Christiaan Tiemeijer
- Applicant Address: US OR HILLSBORO
- Assignee: FEI COMPANY
- Current Assignee: FEI COMPANY
- Current Assignee Address: US OR HILLSBORO
- Main IPC: G01N23/04
- IPC: G01N23/04
Abstract:
A scanning confocal transmission electron microscope includes a descan deflector and a corrector below the sample. The microscope uses a detector that is preferably significantly larger than the resolution of the microscope and is positioned in the real image plane, which provides improved contrast, particularly for light elements.
Public/Granted literature
- US08405027B2 Contrast for scanning confocal electron microscope Public/Granted day:2013-03-26
Information query
