Invention Application
US20120012913A1 SEMICONDUCTOR DEVICE INCLUDING VERTICAL TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME 失效
包括垂直晶体管的半导体器件及其制造方法

  • Patent Title: SEMICONDUCTOR DEVICE INCLUDING VERTICAL TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME
  • Patent Title (中): 包括垂直晶体管的半导体器件及其制造方法
  • Application No.: US12976792
    Application Date: 2010-12-22
  • Publication No.: US20120012913A1
    Publication Date: 2012-01-19
  • Inventor: Kyoung Han LEE
  • Applicant: Kyoung Han LEE
  • Applicant Address: KR Icheon-si
  • Assignee: Hynix Semiconductor Inc.
  • Current Assignee: Hynix Semiconductor Inc.
  • Current Assignee Address: KR Icheon-si
  • Priority: KR10-2010-0067333 20100713
  • Main IPC: H01L27/108
  • IPC: H01L27/108 H01L21/8242
SEMICONDUCTOR DEVICE INCLUDING VERTICAL TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME
Abstract:
A semiconductor device including a vertical transistor and a method for manufacturing the same may reduce a cell area in comparison with a conventional layout of 8F2 and 6F2. Also, the method does not require forming a bit line contact, a storage node contact or a landing plug, thereby decreasing the process steps. The semiconductor device including a vertical transistor comprises: an active region formed in a semiconductor substrate; a bit line disposed in the lower portion of the active region; a word line buried in the active region; and a capacitor disposed over the upper portion of the active region and the word line.
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