发明申请
US20120015147A1 Solution Process for Fabricating a Textured Transparent Conductive Oxide (TCO)
失效
用于制造纹理透明导电氧化物(TCO)的溶液工艺
- 专利标题: Solution Process for Fabricating a Textured Transparent Conductive Oxide (TCO)
- 专利标题(中): 用于制造纹理透明导电氧化物(TCO)的溶液工艺
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申请号: US12836300申请日: 2010-07-14
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公开(公告)号: US20120015147A1公开(公告)日: 2012-01-19
- 发明人: Jer-shen Maa , Gregory S. Herman , Apostolos T. Voutsas
- 申请人: Jer-shen Maa , Gregory S. Herman , Apostolos T. Voutsas
- 主分类号: B32B5/16
- IPC分类号: B32B5/16 ; F24J2/02 ; B05D5/12 ; H01L31/052
摘要:
A solution process is provided for forming a textured transparent conductive oxide (TCO) film. The process provides a substrate, and forms a first layer on the substrate of metal oxide nanoparticles such as ZnO, In2O3, or SnO2. The metal oxide nanoparticles have a faceted structure with an average size greater than 100 nanometers (nm). Voids between the metal oxide nanoparticles have a size about equal to the size of the metal oxide nanoparticles. Then, a second layer is formed overlaying the first layer, filling the voids between the nanoparticles of the first layer, and completely covering the substrate. The result is a continuous TCO film having an average surface roughness that is created by the combination of first and second layers.
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