发明申请
US20120015147A1 Solution Process for Fabricating a Textured Transparent Conductive Oxide (TCO) 失效
用于制造纹理透明导电氧化物(TCO)的溶液工艺

Solution Process for Fabricating a Textured Transparent Conductive Oxide (TCO)
摘要:
A solution process is provided for forming a textured transparent conductive oxide (TCO) film. The process provides a substrate, and forms a first layer on the substrate of metal oxide nanoparticles such as ZnO, In2O3, or SnO2. The metal oxide nanoparticles have a faceted structure with an average size greater than 100 nanometers (nm). Voids between the metal oxide nanoparticles have a size about equal to the size of the metal oxide nanoparticles. Then, a second layer is formed overlaying the first layer, filling the voids between the nanoparticles of the first layer, and completely covering the substrate. The result is a continuous TCO film having an average surface roughness that is created by the combination of first and second layers.
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