发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US12969537申请日: 2010-12-15
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公开(公告)号: US20120025296A1公开(公告)日: 2012-02-02
- 发明人: Seung Hwan KIM
- 申请人: Seung Hwan KIM
- 申请人地址: KR Icheon
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Icheon
- 优先权: KR10-2010-0074635 20100802
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/28
摘要:
A semiconductor device and a method for manufacturing the same are disclosed. The method for manufacturing the semiconductor device comprises: forming a plurality of first pillar patterns each of which includes a sidewall contact by selectively etching a semiconductor substrate; forming a buried bit line at a lower portion of a region between two neighboring first pillar patterns; forming a plurality of second pillar patterns by selectively etching upper portions of the first pillar patterns; and forming a gate coupling second pillar patterns arranged in a direction crossing the bit line, the gate enclosing the second pillar patterns.
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