发明申请
- 专利标题: FILM FORMING APPARATUS AND FILM FORMING METHOD
- 专利标题(中): 薄膜成型装置和薄膜成型方法
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申请号: US13197843申请日: 2011-08-04
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公开(公告)号: US20120031748A1公开(公告)日: 2012-02-09
- 发明人: Shigenori Ishihara
- 申请人: Shigenori Ishihara
- 申请人地址: JP Kawasaki-shi
- 专利权人: CANON ANELVA CORPORATION
- 当前专利权人: CANON ANELVA CORPORATION
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2010-176884 20100806; JP2011-143926 20110629
- 主分类号: C23C14/35
- IPC分类号: C23C14/35
摘要:
The present invention provides a film forming apparatus and a film forming method which are unlikely to be affected by changes in size and shape of a shield board caused by a recovery process. A film forming apparatus includes a shield board surrounding a sputtering space between a process-target substrate on a stage and a target facing each other in a vacuum chamber, and forms a film on the process-target substrate by causing at least one kind of reactive gas and a film forming material to react with each other. The film forming apparatus is configured to control a ratio of the flow rate of the gas to be introduced into the sputtering space to the flow rate of the gas to be introduced into a space between an inner wall of the vacuum chamber and the shield board, based on a pressure value of the sputtering space measured by pressure detection means.
公开/授权文献
- US09175377B2 Film forming apparatus and film forming method 公开/授权日:2015-11-03
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