发明申请
US20120032756A1 RADIO FREQUENCY (RF) POWER FILTERS AND PLASMA PROCESSING SYSTEMS INCLUDING RF POWER FILTERS
有权
无线电频率（RF）功率滤波器和等离子体处理系统，包括射频功率滤波器
- 专利标题： RADIO FREQUENCY (RF) POWER FILTERS AND PLASMA PROCESSING SYSTEMS INCLUDING RF POWER FILTERS
- 专利标题（中）： 无线电频率（RF）功率滤波器和等离子体处理系统，包括射频功率滤波器
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申请号： US12960706申请日： 2010-12-06
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公开(公告)号： US20120032756A1公开(公告)日： 2012-02-09
- 发明人: Maolin LONG , Ralph Lu , Fred Egley , Thomas Anderson , Seyed Jafar Jafarian-Tehrani , Michael Giarratano
- 申请人： Maolin LONG , Ralph Lu , Fred Egley , Thomas Anderson , Seyed Jafar Jafarian-Tehrani , Michael Giarratano
- 主分类号： H03H7/00
- IPC分类号： H03H7/00
摘要：
A filter for filtering radio frequency (RF) power transmitted from an electrostatic chuck (ESC) in a plasma processing system. The plasma processing system may include a heating element disposed at the ESC. The plasma processing system may further include a power supply. The filter may include a core member and a cable wound around and wound along the core member to form a set of inductors. The cable may include a plurality of wires, including a first wire and a second wire, a portion of the first wire and a portion of the second wire being twisted together, a first end of the first wire and a first end of the second wire being connected to the heating element, each of a second end of the first wire and a second end of the second wire being connected to a capacitor and being connected to the power supply.
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