公开(公告)号：US20120032756A1

公开(公告)日：2012-02-09

申请号：US12960706

申请日：2010-12-06

申请人： Maolin LONG ,  Ralph Lu ,  Fred Egley ,  Thomas Anderson ,  Seyed Jafar Jafarian-Tehrani ,  Michael Giarratano

发明人： Maolin LONG ,  Ralph Lu ,  Fred Egley ,  Thomas Anderson ,  Seyed Jafar Jafarian-Tehrani ,  Michael Giarratano

IPC分类号： H03H7/00

CPC分类号： H05H1/46 ,  H01J37/32174 ,  H03H1/0007 ,  H03H7/01 ,  H03H7/38

摘要： A filter for filtering radio frequency (RF) power transmitted from an electrostatic chuck (ESC) in a plasma processing system. The plasma processing system may include a heating element disposed at the ESC. The plasma processing system may further include a power supply. The filter may include a core member and a cable wound around and wound along the core member to form a set of inductors. The cable may include a plurality of wires, including a first wire and a second wire, a portion of the first wire and a portion of the second wire being twisted together, a first end of the first wire and a first end of the second wire being connected to the heating element, each of a second end of the first wire and a second end of the second wire being connected to a capacitor and being connected to the power supply.

摘要翻译： 一种用于过滤在等离子体处理系统中从静电卡盘（ESC）传送的射频（RF）功率的滤波器。 等离子体处理系统可以包括设置在ESC处的加热元件。 等离子体处理系统还可以包括电源。 过滤器可以包括芯部件和缠绕在芯部件上并缠绕的电缆，以形成一组电感器。 电缆可以包括多根线，包括第一线和第二线，第一线的一部分和第二线的一部分被扭绞在一起，第一线的第一端和第二线的第一端 连接到加热元件，第一线的第二端和第二线的第二端中的每一个连接到电容器并连接到电源。