发明申请
US20120033226A1 OPTICS SYMMETRIZATION FOR METROLOGY 有权
OPTICS SYMPETRIZATION FOR METROLOGY

OPTICS SYMMETRIZATION FOR METROLOGY
摘要:
The present invention includes an illumination source, at least one illumination symmetrization module (ISM) configured to symmetrize at least a portion of light emanating from the illumination source, a first beam splitter configured to direct a first portion of light processed by the ISM along an object path to a surface of one or more specimens and a second portion of light processed by the ISM along a reference path, and a detector disposed along a primary optical axis, wherein the detector is configured to collect a portion of light reflected from the surface of the one or more specimens.
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