发明申请
US20120035766A1 SYSTEMS, METHODS AND APPARATUS FOR CHOKED FLOW ELEMENT EXTRACTION
有权
系统，方法和装置用于回流流动元件提取
- 专利标题： SYSTEMS, METHODS AND APPARATUS FOR CHOKED FLOW ELEMENT EXTRACTION
- 专利标题（中）： 系统，方法和装置用于回流流动元件提取
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申请号： US12852375申请日： 2010-08-06
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公开(公告)号： US20120035766A1公开(公告)日： 2012-02-09
- 发明人: Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
- 申请人： Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
- 主分类号： H01L21/3065
- IPC分类号： H01L21/3065 ; H05B31/26 ; G05B13/02 ; H01J61/28
摘要：
A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber, multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites and multiple plasma chamber outlets coupling the plasma chamber to a process chamber. Each one of the plasma chamber outlets having a respective plasma restriction. A system and method for generating a plasma are also described.
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