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    PARTICLE TRAP FOR A PLASMA SOURCE
    3.
    发明申请
    PARTICLE TRAP FOR A PLASMA SOURCE 失效
    用于等离子体源的颗粒捕获

    公开(公告)号：US20090320677A1

    公开(公告)日：2009-12-31

    申请号：US12147078

    申请日：2008-06-26

    申请人： Ali Shajii ,  Xing Chen ,  Andrew Cowe ,  David Burtner ,  William Robert Entley ,  ShouQian Shao

    发明人： Ali Shajii ,  Xing Chen ,  Andrew Cowe ,  David Burtner ,  William Robert Entley ,  ShouQian Shao

    IPC分类号： B01D53/22 ,  B01J19/08 ,  B01D46/46 ,  B01D45/08 ,  B01D50/00

    CPC分类号： H01J37/32357 ,  H01J37/32871 ,  Y10S55/15 ,  Y10T29/4935

    摘要： A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.

    摘要翻译： 用于远程等离子体源的颗粒捕集器包括具有用于耦合到远程等离子体源的室的入口和用于耦合到处理室入口的出口的主体结构。 用于远程等离子体源的颗粒捕获器还包括形成在主体结构中并与主体结构入口和主体结构出口流体连通的气体通道。 气体通道可以限定穿过主体结构的路径，其使得从通道的第一部分通过的气体中的颗粒撞击限定气体通道的第二部分的壁，该壁相对于壁的表面成一定角度。 冷却剂构件可以与气体通道热连通。

    Toroidal plasma chamber for high gas flow rate process
    6.
    发明授权
    Toroidal plasma chamber for high gas flow rate process 有权
    环形等离子体室用于高气体流量过程

    公开(公告)号：US09275839B2

    公开(公告)日：2016-03-01

    申请号：US12738314

    申请日：2007-10-19

    申请人： Xing Chen ,  Andrew Cowe

    发明人： Xing Chen ,  Andrew Cowe

    IPC分类号： H01J37/32

    CPC分类号： H01J37/32357 ,  H01J37/3244 ,  H01J37/32449

    摘要： A plasma chamber for activating a process gas, including at least four legs forming a toroidal plasma channel, each leg having a cross-sectional area, and an outlet formed on one leg, the outlet having a greater cross-sectional area than the cross-sectional area of the other legs. The plasma chamber further includes an inlet for receiving the process gas and a plenum for introducing the process gas over a broad area of the leg opposing the outlet to reduce localized high plasma impedance and gas flow instability, wherein the leg opposing the outlet defines a plurality of holes for providing a helical gas rotation in the plasma channel.

    摘要翻译： 一种用于激活处理气体的等离子体室，包括形成环形等离子体通道的至少四条腿，每条腿具有横截面积，以及形成在一条腿上的出口，该出口具有比截面积更大的横截面面积， 其他腿的截面积。 等离子体室还包括用于接收处理气体的入口和用于将处理气体引导到与出口相对的腿的宽阔区域上以减少局部高等离子体阻抗和气流不稳定性的集气室，其中与出口相对的腿限定多个 的孔用于在等离子体通道中提供螺旋形气体旋转。

    Particle trap for a plasma source
    9.
    发明授权
    Particle trap for a plasma source 失效
    用于等离子体源的粒子阱

    公开(公告)号：US07914603B2

    公开(公告)日：2011-03-29

    申请号：US12147078

    申请日：2008-06-26

    申请人： Ali Shajii ,  Xing Chen ,  Andrew Cowe ,  David Burtner ,  William Robert Entley ,  ShouQian Shao

    发明人： Ali Shajii ,  Xing Chen ,  Andrew Cowe ,  David Burtner ,  William Robert Entley ,  ShouQian Shao

    IPC分类号： B01D46/46

    CPC分类号： H01J37/32357 ,  H01J37/32871 ,  Y10S55/15 ,  Y10T29/4935

    摘要： A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.

    摘要翻译： 用于远程等离子体源的颗粒捕集器包括具有用于耦合到远程等离子体源的室的入口和用于耦合到处理室入口的出口的主体结构。 用于远程等离子体源的颗粒捕获器还包括形成在主体结构中并与主体结构入口和主体结构出口流体连通的气体通道。 气体通道可以限定穿过主体结构的路径，其使得从通道的第一部分通过的气体中的颗粒撞击限定气体通道的第二部分的壁，该壁相对于壁的表面成一定角度。 冷却剂构件可以与气体通道热连通。