发明申请
US20120042713A1 GAS SENSOR USING METAL OXIDE NANOPARTICLES, AND METHOD FOR MANUFACTURING SAME
有权
使用金属氧化物纳米颗粒的气体传感器及其制造方法
- 专利标题: GAS SENSOR USING METAL OXIDE NANOPARTICLES, AND METHOD FOR MANUFACTURING SAME
- 专利标题(中): 使用金属氧化物纳米颗粒的气体传感器及其制造方法
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申请号: US13266815申请日: 2010-04-30
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公开(公告)号: US20120042713A1公开(公告)日: 2012-02-23
- 发明人: Il-Doo Kim , Dong-Young Kim , Sung-Yeon Jang , Seong-Mu Jo , Jae-Min Hong , Yun-Seok Lee , Sung-Chul Yang
- 申请人: Il-Doo Kim , Dong-Young Kim , Sung-Yeon Jang , Seong-Mu Jo , Jae-Min Hong , Yun-Seok Lee , Sung-Chul Yang
- 申请人地址: KR Seoul KR Gyeonggi-do
- 专利权人: Korea Institute of Science and Technology,Amogreentech Co., Ltd.
- 当前专利权人: Korea Institute of Science and Technology,Amogreentech Co., Ltd.
- 当前专利权人地址: KR Seoul KR Gyeonggi-do
- 优先权: KR10-2009-0038043 20090430
- 国际申请: PCT/KR10/02766 WO 20100430
- 主分类号: G01N27/12
- IPC分类号: G01N27/12 ; B05D1/04 ; B05D5/12
摘要:
The present invention provides a gas sensor, including: a sensor substrate provided with an electrode; and a thin layer of sensor material formed by spraying a solution in which metal oxide nanoparticles are dispersed onto the sensor substrate. The gas sensor is advantageous in that a sensor material is formed into a porous thin layer containing metal oxide nanoparticles having a large specific surface area, thus realizing high sensitivity on the ppb scale and a high reaction rate. Further, the gas sensor is advantageous in that it can be manufactured at room temperature, and the thickness of a sensor material can be easily adjusted by adjusting the spray time, so that a thin gas sensor or a thick gas sensor can be easily manufactured.
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