发明申请
- 专利标题: ENDPOINT CONTROL OF MULTIPLE SUBSTRATES OF VARYING THICKNESS ON THE SAME PLATEN IN CHEMICAL MECHANICAL POLISHING
- 专利标题(中): 在化学机械抛光中相同板上变化厚度的多个基板的端点控制
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申请号: US12871714申请日: 2010-08-30
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公开(公告)号: US20120053717A1公开(公告)日: 2012-03-01
- 发明人: Alain Duboust , Stephen Jew , David H. Mai , Huyen Tran , Wen-Chiang Tu , Shih-Haur Shen , Jimin Zhang , Ingemar Carlsson , Boguslaw A. Swedek , Zhihong Wang
- 申请人: Alain Duboust , Stephen Jew , David H. Mai , Huyen Tran , Wen-Chiang Tu , Shih-Haur Shen , Jimin Zhang , Ingemar Carlsson , Boguslaw A. Swedek , Zhihong Wang
- 主分类号: G06F17/00
- IPC分类号: G06F17/00
摘要:
A difference between a first expected required polish time for a first substrate and a second expected required polish time for a second substrate is determined using a first pre-polish thickness and a second pre-polish thickness measured at an in-line metrology station. A duration of an initial period is determined based on the difference between the first expected required polish time and the second expected required polish time. For the initial period at a beginning of a polishing operation, no pressure is applied to whichever of the first substrate and the second substrate has a lesser expected required polish time while simultaneously pressure is applied to whichever of the first substrate and the second substrate has a greater expected required polish time. After the initial period, pressure is applied to both the first substrate and the second substrate.
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