Feedback Control Using Detection Of Clearance And Adjustment For Uniform Topography
    5.
    发明申请
    Feedback Control Using Detection Of Clearance And Adjustment For Uniform Topography 有权
    反馈控制使用检测的均匀地形的清除和调整

    公开(公告)号:US20130224890A1

    公开(公告)日:2013-08-29

    申请号:US13774843

    申请日:2013-02-22

    CPC classification number: H01L22/26 B24B37/005 B24B37/04 B24B49/12 H01L22/12

    Abstract: A method of controlling polishing includes storing a desired ratio representing a ratio for a clearance time of a first zone of a substrate to a clearance time of a second zone of the substrate. During polishing of a first substrate, an overlying layer is monitored, a sequence of measurements is generated, and the measurements are sorted a first group associated with the first zone of the substrate and a second group associated with the second zone on the substrate. A first time and a second time at which the overlying layer is cleared is determined based on the measurements from the first group and the second group, respectively. At least one adjusted polishing pressure is calculated for the first zone based on a first pressure applied in the first zone during polishing the first substrate, the first time, the second time, and the desired ratio.

    Abstract translation: 控制抛光的方法包括将表示基材的第一区域的间隙时间的比率与基材的第二区域的间隙时间的所需比率进行存储。 在第一衬底的抛光期间,监测上覆层,产生一系列测量,并且对与衬底的第一区域相关联的第一组和与衬底上的第二区域相关联的第二组对第一组进行测量。 基于来自第一组和第二组的测量,分别确定覆盖层被清除的第一次和第二次。 基于在抛光第一基板期间第一区域中施加的第一压力,第一时间,第二时间和期望比率,针对第一区域计算至少一个调整的抛光压力。

    Endpoint control of multiple-wafer chemical mechanical polishing
    7.
    发明授权
    Endpoint control of multiple-wafer chemical mechanical polishing 失效
    多晶圆化学机械抛光的端点控制

    公开(公告)号:US08295967B2

    公开(公告)日:2012-10-23

    申请号:US12267434

    申请日:2008-11-07

    CPC classification number: B24B37/013 B24B49/12

    Abstract: A computer-implemented method includes polishing substrates simultaneously in a polishing apparatus. Each substrate has a polishing rate independently controllable by an independently variable polishing parameter. Measurement data that varies with the thickness of each of the substrates is acquired from each of the substrates during polishing with an in-situ monitoring system. A projected thickness that each substrate will have at a target time is determined based on the measurement data. The polishing parameter for at least one substrate is adjusted to adjust the polishing rate of the at least one substrate such that the substrates have closer to the same thickness at the target time than without the adjustment.

    Abstract translation: 计算机实现的方法包括在抛光装置中同时抛光衬底。 每个基底具有通过独立可变抛光参数独立控制的抛光速率。 随着每个基板的厚度变化的测量数据在用原位监测系统进行抛光时从每个基板获得。 基于测量数据确定每个基板在目标时间具有的投影厚度。 调整至少一个基板的抛光参数以调节至少一个基板的抛光速率,使得基板在目标时间比不进行调节更接近相同的厚度。

    Determining Physical Property of Substrate
    8.
    发明申请
    Determining Physical Property of Substrate 审中-公开
    确定基材的物理性质

    公开(公告)号:US20110294400A1

    公开(公告)日:2011-12-01

    申请号:US13193011

    申请日:2011-07-28

    CPC classification number: G01B11/0683 G01B11/0625 Y10S707/99936

    Abstract: A method of determining a physical property of a substrate includes recording a first spectrum obtained from a substrate, the first spectrum being obtained during a polishing process that alters a physical property of the substrate. The method includes identifying, in a database, at least one of several previously recorded spectra that is similar to the recorded first spectrum. Each of the spectra in the database has a physical property value associated therewith. The method includes generating a signal indicating that a first value of the physical property is associated with the first spectrum, the first value being determined using the physical property value associated with the identified previously recorded spectrum in the database. A system for determining a physical property of a substrate includes a polishing machine, an endpoint determining module, and a database.

    Abstract translation: 确定基板的物理性质的方法包括记录从基板获得的第一光谱,第一光谱是在改变基板的物理性质的抛光工艺期间获得的第一光谱。 该方法包括在数据库中识别与记录的第一光谱相似的几个先前记录的光谱中的至少一个。 数据库中的每个光谱具有与之相关联的物理属性值。 该方法包括产生指示物理属性的第一值与第一频谱相关联的信号,第一值使用与数据库中所识别的先前记录的频谱相关联的物理属性值来确定。 用于确定基板的物理性质的系统包括抛光机,端点确定模块和数据库。

    Determining physical property of substrate
    9.
    发明授权
    Determining physical property of substrate 有权
    确定底物的物理性质

    公开(公告)号:US07746485B2

    公开(公告)日:2010-06-29

    申请号:US12253160

    申请日:2008-10-16

    CPC classification number: G01B11/0683 G01B11/0625 Y10S707/99936

    Abstract: A method of determining a physical property of a substrate includes recording a first spectrum obtained from a substrate, the first spectrum being obtained during a polishing process that alters a physical property of the substrate. The method includes identifying, in a database, at least one of several previously recorded spectra that is similar to the recorded first spectrum. Each of the spectra in the database has a physical property value associated therewith. The method includes generating a signal indicating that a first value of the physical property is associated with the first spectrum, the first value being determined using the physical property value associated with the identified previously recorded spectrum in the database. A system for determining a physical property of a substrate includes a polishing machine, an endpoint determining module, and a database.

    Abstract translation: 确定基板的物理性质的方法包括记录从基板获得的第一光谱,第一光谱是在改变基板的物理性质的抛光工艺期间获得的第一光谱。 该方法包括在数据库中识别与记录的第一光谱相似的几个先前记录的光谱中的至少一个。 数据库中的每个光谱具有与之相关联的物理属性值。 该方法包括产生指示物理属性的第一值与第一频谱相关联的信号,第一值使用与数据库中所识别的先前记录的频谱相关联的物理属性值来确定。 用于确定基板的物理性质的系统包括抛光机,端点确定模块和数据库。

    EDDY CURRENT SENSOR WITH ENHANCED EDGE RESOLUTION
    10.
    发明申请
    EDDY CURRENT SENSOR WITH ENHANCED EDGE RESOLUTION 有权
    EDDY电流传感器与增强边缘分辨率

    公开(公告)号:US20100124792A1

    公开(公告)日:2010-05-20

    申请号:US12616761

    申请日:2009-11-11

    Abstract: An apparatus for monitoring the thickness of a conductive layer on a substrate includes a support to hold a substrate having a conductive layer, an eddy current monitoring system including a first plurality of core portions, and a motor to cause relative motion between the support and the eddy current monitoring system such that the substrate moves across the first plurality of core portions in a direction that defines a first axis. At least one core portion is positioned further from a second axis than at least two other core portions. The second axis is orthogonal to the first axis.

    Abstract translation: 用于监测基板上的导电层的厚度的装置包括:用于保持具有导电层的基板的支撑体,包括第一多个芯部的涡流监视系统,以及引起支撑件与支撑件之间的相对运动的马达 涡流监视系统,使得基板沿着限定第一轴线的方向跨越第一多个芯部分移动。 至少一个芯部比第二轴更靠近至少两个其它芯部。 第二轴与第一轴正交。

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