发明申请
- 专利标题： Carrier for a Silicon Block and Method for Producing Such a Carrier and Arrangement
- 专利标题（中）： 硅块载体及其生产方法
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申请号： US13301332申请日： 2011-11-21
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公开(公告)号： US20120064300A1公开(公告)日： 2012-03-15
- 发明人: Reinhard Huber , Sven Worm
- 申请人： Reinhard Huber , Sven Worm
- 申请人地址： DE Freudenstadt
- 专利权人： Gebr. Schmid GmbH
- 当前专利权人： Gebr. Schmid GmbH
- 当前专利权人地址： DE Freudenstadt
- 优先权： DE102009023122.6 20090522
- 主分类号： B32B3/30
- IPC分类号： B32B3/30 ; B32B5/02 ; B29C47/00 ; B32B7/04
摘要：
A silicon block is firmly connected to a carrier for being moved together for further working by sawing, cleaning or the like. The carrier consists of plastic, for example of glass-fibre-reinforced plastic, and has in its interior a number of continuous longitudinal channels. These longitudinal channels are sawn into, and so cleaning fluid can then be introduced into the intermediate space between the sawn-up wafers in order to flush out sawing remains.
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