公开(公告)号：US20120064300A1

公开(公告)日：2012-03-15

申请号：US13301332

申请日：2011-11-21

申请人： Reinhard Huber ,  Sven Worm

发明人： Reinhard Huber ,  Sven Worm

IPC分类号： B32B3/30 ,  B32B5/02 ,  B29C47/00 ,  B32B7/04

CPC分类号： B28D5/0076 ,  B28D5/0082 ,  Y10T428/24479 ,  Y10T428/2457 ,  Y10T428/24744

摘要： A silicon block is firmly connected to a carrier for being moved together for further working by sawing, cleaning or the like. The carrier consists of plastic, for example of glass-fibre-reinforced plastic, and has in its interior a number of continuous longitudinal channels. These longitudinal channels are sawn into, and so cleaning fluid can then be introduced into the intermediate space between the sawn-up wafers in order to flush out sawing remains.

摘要翻译： 硅块牢固地连接到载体上以通过锯切，清洁等方式一起移动以进一步工作。 载体由例如玻璃纤维增​​强塑料的塑料组成，并且在其内部具有多个连续的纵向通道。 这些纵向通道被锯入，因此清洁流体然后可以被引入到锯切晶片之间的中间空间中，以便冲出锯切残留物。

公开(公告)号：US08524008B2

公开(公告)日：2013-09-03

申请号：US13355223

申请日：2012-01-20

申请人： Sven Worm ,  Reinhard Huber

发明人： Sven Worm ,  Reinhard Huber

IPC分类号： B08B3/04

CPC分类号： H01L31/18 ,  B28D5/0076 ,  B28D5/0082 ,  H01L21/67051 ,  H01L21/67313

摘要： In the case of a device and a method for cleaning substrates on a carrier, to the underside of which the substrates are fastened so as to be parallel to and slightly apart from one another, the carrier has in its interior a plurality of longitudinal channels, which run parallel to one another. As a result of the sawing of the wafers, they merge, via openings, into interstices between the substrates. As a result of a relative movement, an elongate tube, from which cleaning fluid is let out, is introduced into one of the longitudinal channels, the relative movement being achieved substantially through moving of the carrier.

摘要翻译： 在用于清洁载体上的基板的装置和方法的情况下，基板的下侧被紧固以彼此平行并且稍微分开，载体在其内部具有多个纵向通道， 它们彼此平行。 作为晶片锯切的结果，它们通过开口合并到基板之间的空隙中。 作为相对运动的结果，从其中排出清洁流体的细长管被引入到纵向通道之一中，基本上通过移动载体来实现相对运动。

公开(公告)号：US20120118329A1

公开(公告)日：2012-05-17

申请号：US13355223

申请日：2012-01-20

申请人： Sven Worm ,  Reinhard Huber

发明人： Sven Worm ,  Reinhard Huber

IPC分类号： B08B3/00 ,  B08B7/00

CPC分类号： H01L31/18 ,  B28D5/0076 ,  B28D5/0082 ,  H01L21/67051 ,  H01L21/67313

摘要： In the case of a device and a method for cleaning substrates on a carrier, to the underside of which the substrates are fastened so as to be parallel to and slightly apart from one another, the carrier has in its interior a plurality of longitudinal channels, which run parallel to one another. As a result of the sawing of the wafers, they merge, via openings, into interstices between the substrates. As a result of a relative movement, an elongate tube, from which cleaning fluid is let out, is introduced into one of the longitudinal channels, the relative movement being achieved substantially through moving of the carrier.

摘要翻译： 在用于清洁载体上的基板的装置和方法的情况下，基板的下侧被紧固以彼此平行并且稍微分开，载体在其内部具有多个纵向通道， 它们彼此平行。 作为晶片锯切的结果，它们通过开口合并到基板之间的空隙中。 作为相对运动的结果，从其中排出清洁流体的细长管被引入到纵向通道之一中，基本上通过移动载体来实现相对运动。

公开(公告)号：US20120132236A1

公开(公告)日：2012-05-31

申请号：US13356259

申请日：2012-01-23

申请人： Christoph Hartmann ,  Sven Worm

发明人： Christoph Hartmann ,  Sven Worm

IPC分类号： B08B3/04

CPC分类号： H01L21/67051 ,  B28D5/0076 ,  B28D5/0082 ,  H01L21/67313

摘要： An apparatus for cleaning substrates on a carrier, which has in the interior thereof a plurality of longitudinal passages, which run parallel to one another and are connected to the outside at the underside of the carrier via openings. There is provided a plurality of elongated pipes, which are arranged on a pipe holder and are connected in a fluid-conducting manner to a fluid supply. A centring template is provided, which encompasses the pipes and is displaceable in the longitudinal direction thereof between an attachment position in the end region of the pipes away from the pipe holder and a working position, which lies between the attachment position and the pipe holder. The centring template bears against the carrier, such that the pipes are then aligned exactly with the longitudinal passages.

摘要翻译： 一种用于清洁载体上的基板的装置，其在其内部具有多个彼此平行延伸并在载体通孔的下侧连接到外部的多个纵向通道。 设置有多个细长管，它们设置在管保持器上并且以流体传导方式连接到流体供应。 提供了一种定心模板，其包围管道，并且可在纵向方向上位于远离管座的管道端部区域中的安装位置和位于安装位置与管座之间的工作位置之间。 定心模板抵靠载体，使得管道然后与纵向通道精确对准。

公开(公告)号：US08387636B2

公开(公告)日：2013-03-05

申请号：US13356259

申请日：2012-01-23

申请人： Christoph Hartmann ,  Sven Worm

发明人： Christoph Hartmann ,  Sven Worm

IPC分类号： B08B3/02

CPC分类号： H01L21/67051 ,  B28D5/0076 ,  B28D5/0082 ,  H01L21/67313

摘要： An apparatus for cleaning substrates on a carrier, which has in the interior thereof a plurality of longitudinal passages, which run parallel to one another and are connected to the outside at the underside of the carrier via openings. There is provided a plurality of elongated pipes, which are arranged on a pipe holder and are connected in a fluid-conducting manner to a fluid supply. A centering template is provided, which encompasses the pipes and is displaceable in the longitudinal direction thereof between an attachment position in the end region of the pipes away from the pipe holder and a working position, which lies between the attachment position and the pipe holder. The centering template bears against the carrier, such that the pipes are then aligned exactly with the longitudinal passages.

摘要翻译： 一种用于清洁载体上的基板的装置，其在其内部具有多个彼此平行延伸并在载体通孔的下侧连接到外部的多个纵向通道。 设置有多个细长管，它们设置在管保持器上并且以流体传导方式连接到流体供应。 提供了一种定心模板，其包围管道，并且可在纵向方向上位于远离管座的管道端部区域中的安装位置和位于安装位置与管座之间的工作位置之间。 定心模板抵靠载体，使得管道然后与纵向通道精确对准。