发明申请
- 专利标题： THERMALLY ZONED SUBSTRATE HOLDER ASSEMBLY
- 专利标题（中）： 热隔离的基座支架组件
-
申请号： US13307176申请日： 2011-11-30
-
公开(公告)号： US20120067866A1公开(公告)日： 2012-03-22
- 发明人: Steven T. FINK , Eric J. Strang
- 申请人： Steven T. FINK , Eric J. Strang
- 申请人地址： JP Minato-ku
- 专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人地址： JP Minato-ku
- 主分类号： H05B3/02
- IPC分类号： H05B3/02 ; F25B21/02
摘要：
A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas- or vacuum-filled chamber).
公开/授权文献
- US08927907B2 Thermally zoned substrate holder assembly 公开/授权日：2015-01-06
信息查询
