Invention Application
- Patent Title: ION BEAM TUNING
- Patent Title (中): 离子束调谐
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Application No.: US12887068Application Date: 2010-09-21
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Publication No.: US20120068081A1Publication Date: 2012-03-22
- Inventor: Shengwu Chang , Joseph C. Olson , Frank Sinclair , Matthew P. McClellan
- Applicant: Shengwu Chang , Joseph C. Olson , Frank Sinclair , Matthew P. McClellan
- Applicant Address: US MA Gloucester
- Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCISTES, INC.
- Current Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCISTES, INC.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/12 ; H01J37/147

Abstract:
A beam line ion implanter includes an ion source configured to generate an ion beam, a scanner configured to scan the ion beam to produce a scanned ion beam having trajectories which diverge from a scan origin, and a focusing element having a focusing field positioned upstream of the scanner configured to focus the ion beam to a focal point at the scan origin. A method of ion beam tuning includes generating an ion beam, focusing the ion beam to a focal point positioned at a scan origin, and scanning the ion beam to produce a scanned ion beam having trajectories which diverge from the scan origin.
Public/Granted literature
- US08330125B2 Ion beam tuning Public/Granted day:2012-12-11
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