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公开(公告)号：US20120088035A1
公开(公告)日：2012-04-12
申请号：US13270644
申请日：2011-10-11
CPC分类号： H01L21/67109 , H01L21/67288
摘要： A system and method for maintain a desired degree of platen flatness is disclosed. A laser system is used to measure the flatness of a platen. The temperature of the platen is then varied to achieve the desired level of flatness. In some embodiments, this laser system is only used during a set up period and the resulting desired temperature is then used during normal operation. In other embodiments, a laser system is used to measure the flatness of the platen, even while the workpiece is being processed.
摘要翻译： 公开了一种用于保持期望的压板平整度的系统和方法。 激光系统用于测量压板的平整度。 然后改变压板的温度以达到所需的平坦度水平。 在一些实施例中，该激光系统仅在建立周期期间使用，然后在正常操作期间使用所得到的期望温度。 在其他实施例中，即使在正在处理工件时，也使用激光系统来测量压板的平坦度。
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公开(公告)号：US08330125B2
公开(公告)日：2012-12-11
申请号：US12887068
申请日：2010-09-21
IPC分类号： H01J37/10
CPC分类号： H01J37/3171 , H01J37/21 , H01J2237/216 , H01J2237/24405 , H01J2237/24528 , H01J2237/24542
摘要： A beam line ion implanter includes an ion source configured to generate an ion beam, a scanner configured to scan the ion beam to produce a scanned ion beam having trajectories which diverge from a scan origin, and a focusing element having a focusing field positioned upstream of the scanner configured to focus the ion beam to a focal point at the scan origin. A method of ion beam tuning includes generating an ion beam, focusing the ion beam to a focal point positioned at a scan origin, and scanning the ion beam to produce a scanned ion beam having trajectories which diverge from the scan origin.
摘要翻译： 束线离子注入机包括被配置为产生离子束的离子源，扫描器，被配置为扫描离子束以产生具有从扫描原点发散的轨迹的扫描离子束;以及聚焦元件，其具有位于 扫描器被配置为将离子束聚焦到扫描原点处的焦点。 离子束调谐的方法包括产生离子束，将离子束聚焦到位于扫描原点的焦点，并扫描离子束以产生具有与扫描原点分离的轨迹的扫描离子束。
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公开(公告)号：US09012337B2
公开(公告)日：2015-04-21
申请号：US13270644
申请日：2011-10-11
IPC分类号： H01L21/027 , H01L21/66 , H01L21/67
CPC分类号： H01L21/67109 , H01L21/67288
摘要： A system and method for maintain a desired degree of platen flatness is disclosed. A laser system is used to measure the flatness of a platen. The temperature of the platen is then varied to achieve the desired level of flatness. In some embodiments, this laser system is only used during a set up period and the resulting desired temperature is then used during normal operation. In other embodiments, a laser system is used to measure the flatness of the platen, even while the workpiece is being processed.
摘要翻译： 公开了一种用于保持期望的压板平整度的系统和方法。 激光系统用于测量压板的平整度。 然后改变压板的温度以达到所需的平坦度水平。 在一些实施例中，该激光系统仅在建立周期期间使用，然后在正常操作期间使用所得到的期望温度。 在其他实施例中，即使在正在处理工件时，也使用激光系统来测量压板的平坦度。
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公开(公告)号：US20120068081A1
公开(公告)日：2012-03-22
申请号：US12887068
申请日：2010-09-21
IPC分类号： H01J37/317 , H01J37/12 , H01J37/147
CPC分类号： H01J37/3171 , H01J37/21 , H01J2237/216 , H01J2237/24405 , H01J2237/24528 , H01J2237/24542
摘要： A beam line ion implanter includes an ion source configured to generate an ion beam, a scanner configured to scan the ion beam to produce a scanned ion beam having trajectories which diverge from a scan origin, and a focusing element having a focusing field positioned upstream of the scanner configured to focus the ion beam to a focal point at the scan origin. A method of ion beam tuning includes generating an ion beam, focusing the ion beam to a focal point positioned at a scan origin, and scanning the ion beam to produce a scanned ion beam having trajectories which diverge from the scan origin.
摘要翻译： 束线离子注入机包括被配置为产生离子束的离子源，扫描器，被配置为扫描离子束以产生具有从扫描原点发散的轨迹的扫描离子束;以及聚焦元件，其具有位于 扫描器被配置为将离子束聚焦到扫描原点处的焦点。 离子束调谐的方法包括产生离子束，将离子束聚焦到位于扫描原点的焦点，并扫描离子束以产生具有与扫描原点分离的轨迹的扫描离子束。
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公开(公告)号：US08663331B2
公开(公告)日：2014-03-04
申请号：US11947884
申请日：2007-11-30
IPC分类号： A61F2/44
CPC分类号： A61F2/4455 , A61F2/4611 , A61F2002/2835 , A61F2002/30112 , A61F2002/30471 , A61F2002/30579 , A61F2002/30784 , A61F2002/3082 , A61F2002/30904 , A61F2220/0091 , A61F2230/0004
摘要： A transforaminal lumbar interbody fusion (TLIF) implant to be placed in an intervertebral space includes a front member and a back member. The front member includes a first end having a hinge, a second end, a pair of lateral portions, a top wall and a bottom wall, an opening configured through the pair of lateral portions and a plurality of openings in each of the top wall and the bottom wall. The back member includes a first end having an arcuately-shaped attachment head comprising a receptor dimensioned and configured to accommodate the hinge of the front member, a second end, a pair of lateral portions, a top wall, a bottom wall and an opening configured through the pair of lateral portions. The top wall and the bottom wall of the back member further comprise a plurality of openings.
摘要翻译： 经椎间孔腰椎间融合（TLIF）植入物放置在椎间空间中包括前部构件和后部构件。 前部构件包括具有铰链的第一端，第二端，一对侧部，顶壁和底壁，通过一对横向部分构造的开口，以及在每个顶壁和 底壁。 后部构件包括具有弧形附接头部的第一端部，该第一端部包括被定位并构造成容纳前部构件的铰链的接收器，第二端部，一对侧部，顶壁，底壁和构造的开口 通过一对横向部分。 后部构件的顶壁和底壁还包括多个开口。
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公开(公告)号：US20090143859A1
公开(公告)日：2009-06-04
申请号：US11947884
申请日：2007-11-30
IPC分类号： A61F2/44
CPC分类号： A61F2/4455 , A61F2/4611 , A61F2002/2835 , A61F2002/30112 , A61F2002/30471 , A61F2002/30579 , A61F2002/30784 , A61F2002/3082 , A61F2002/30904 , A61F2220/0091 , A61F2230/0004
摘要： A transforaminal lumbar interbody fusion (TLIF) implant to be placed in an intervertebral space includes a front member and a back member. The front member includes a first end having a hinge, a second end, a pair of lateral portions, a top wall and a bottom wall, an opening configured through the pair of lateral portions and a plurality of openings in each of the top wall and the bottom wall. The back member includes a first end having an arcuately-shaped attachment head comprising a receptor dimensioned and configured to accommodate the hinge of the front member, a second end, a pair of lateral portions, a top wall, a bottom wall and an opening configured through the pair of lateral portions. The top wall and the bottom wall of the back member further comprise a plurality of openings.
摘要翻译： 经椎间孔腰椎间融合（TLIF）植入物放置在椎间空间中包括前部构件和后部构件。 前部构件包括具有铰链的第一端，第二端，一对侧部，顶壁和底壁，通过一对横向部分构造的开口，以及在每个顶壁和 底壁。 后部构件包括具有弧形附接头部的第一端部，该第一端部包括被定位并构造成容纳前部构件的铰链的接收器，第二端部，一对侧部，顶壁，底壁和构造的开口 通过一对横向部分。 后部构件的顶壁和底壁还包括多个开口。
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