发明申请
- 专利标题: METHOD AND APPARATUS FOR MICROCONTACT PRINTING OF MEMS
- 专利标题(中): MEMS微型打印的方法与装置
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申请号: US13248901申请日: 2011-09-29
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公开(公告)号: US20120069488A1公开(公告)日: 2012-03-22
- 发明人: Vladimir Bulovic , Corinne Evelyn Packard , Jennifer Jong-Hua Yu , Apoorva Murarka , LeeAnn Kim
- 申请人: Vladimir Bulovic , Corinne Evelyn Packard , Jennifer Jong-Hua Yu , Apoorva Murarka , LeeAnn Kim
- 申请人地址: US MA Cambridge
- 专利权人: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- 当前专利权人: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- 当前专利权人地址: US MA Cambridge
- 优先权: USPCT/US09/067801 20091214
- 主分类号: H01G4/06
- IPC分类号: H01G4/06
摘要:
The embodiments disclosed herein are directed to fabrication methods useful for creating MEMS via microcontact printing by using small organic molecule release layers. The disclose method enables transfer of a continuous metal film onto a discontinuous platform to form a variable capacitor array. The variable capacitor array can produce mechanical motion under the application of a voltage. The methods disclosed herein eliminate masking and other traditional MEMS fabrication methodology. The methods disclosed herein can be used to form a substantially transparent MEMS having a PDMS layer interposed between an electrode and a graphene diaphragm.
公开/授权文献
- US08601658B2 Method for forming a MEMS capacitor array 公开/授权日:2013-12-10
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