发明申请
US20120069488A1 METHOD AND APPARATUS FOR MICROCONTACT PRINTING OF MEMS 有权
MEMS微型打印的方法与装置

METHOD AND APPARATUS FOR MICROCONTACT PRINTING OF MEMS
摘要:
The embodiments disclosed herein are directed to fabrication methods useful for creating MEMS via microcontact printing by using small organic molecule release layers. The disclose method enables transfer of a continuous metal film onto a discontinuous platform to form a variable capacitor array. The variable capacitor array can produce mechanical motion under the application of a voltage. The methods disclosed herein eliminate masking and other traditional MEMS fabrication methodology. The methods disclosed herein can be used to form a substantially transparent MEMS having a PDMS layer interposed between an electrode and a graphene diaphragm.
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