Invention Application
US20120076172A1 MICRO-ELECTRO-MECHANICAL-SYSTEM TEMPERATURE SENSOR 失效
微电子机械系统温度传感器

MICRO-ELECTRO-MECHANICAL-SYSTEM TEMPERATURE SENSOR
Abstract:
The present invention provides a micro-electro-mechanical-system (MEMS) temperature sensor that employs a suspended spiral comprising a material with a positive coefficient of thermal expansion. The thermal expansion of the suspended spiral is guided to by a set of guideposts to provide a linear movement of the free end of the suspended spiral, which is converted to an electrical signal by a set of conductive rotor azimuthal fins that are interdigitated with a set of conductive stator azimuthal fins by measuring the amount of capacitive coupling therebetween. Real time temperature may thus be measured through the in-situ measurement of the capacitive coupling. Optionally, the MEMS temperature sensor may have a ratchet and a pawl to enable ex-situ measurement.
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