- 专利标题： GRAPHENE INTERCONNECTION AND METHOD OF MANUFACTURING THE SAME
- 专利标题（中）： 石墨互连及其制造方法
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申请号： US13216445申请日： 2011-08-24
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公开(公告)号： US20120080662A1公开(公告)日： 2012-04-05
- 发明人: Tatsuro Saito , Makoto Wada , Akihiro Kajita
- 申请人： Tatsuro Saito , Makoto Wada , Akihiro Kajita
- 申请人地址： JP Tokyo
- 专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2010-225776 20101005
- 主分类号： H01L29/15
- IPC分类号： H01L29/15 ; H01L21/283
摘要：
According to one embodiment, a graphene interconnection includes a first insulating film, a first catalyst film, and a first graphene layer. A first insulating film includes an interconnection trench. A first catalyst film is formed on the first insulating film on both side surfaces of the interconnection trench. A first graphene layer is formed on the first catalyst film on the both side surfaces of the interconnection trench, and including graphene sheets stacked in a direction perpendicularly to the both side surfaces.
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