发明申请
- 专利标题： LIGHT SENSING ELEMENT, SEMICONDUCTOR DEVICE, ELECTRONIC EQUIPMENT, MANUFACTURING METHOD OF LIGHT SENSING ELEMENT, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- 专利标题（中）： 光感元件，半导体器件，电子设备，光感元件的制造方法及半导体器件的制造方法
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申请号： US13242416申请日： 2011-09-23
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公开(公告)号： US20120081638A1公开(公告)日： 2012-04-05
- 发明人: Hiroshi Yumoto , Shuji Yoneda , Yusuke Murakawa , Hideo Yamagata
- 申请人： Hiroshi Yumoto , Shuji Yoneda , Yusuke Murakawa , Hideo Yamagata
- 申请人地址： JP Tokyo
- 专利权人： SONY CORPORATION
- 当前专利权人： SONY CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2010-225011 20101004
- 主分类号： G02F1/1333
- IPC分类号： G02F1/1333 ; G01J1/44 ; H01L31/18 ; H01L31/102
摘要：
A light sensing element includes a photodiode formed on a semiconductor substrate surface, and a laminated structure formed on the photodiode, wherein the laminated structure includes a first layer formed of a silicon oxide film, a second layer formed on the first layer and formed of a silicon nitride film, and a third layer formed on the second layer and formed of a polysilicon film.
公开/授权文献
- US1224936A Lock-bolt. 公开/授权日：1917-05-08
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