发明申请
- 专利标题: SEMICONDUCTOR DEVICE WITH VERTICAL CHANNEL TRANSISTOR AND METHOD OF FABRICATING THE SAME
- 专利标题(中): 具有垂直通道晶体管的半导体器件及其制造方法
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申请号: US13097365申请日: 2011-04-29
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公开(公告)号: US20120086066A1公开(公告)日: 2012-04-12
- 发明人: Daeik KIM , HyeongSun HONG , Yoosang HWANG , Hyun-Woo CHUNG
- 申请人: Daeik KIM , HyeongSun HONG , Yoosang HWANG , Hyun-Woo CHUNG
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2010-0098120 20101008
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242
摘要:
A semiconductor memory device includes a semiconductor substrate, a semiconductor pillar extending from the semiconductor substrate, the semiconductor pillar comprising a first region, a second region, and a third region, the second region positioned between the first region and the third region, the third region positioned between the second region and the semiconductor substrate, immediately adjacent regions having different conductivity types, a first gate pattern disposed on the second region with a first insulating layer therebetween, and a second gate pattern disposed on the third region, wherein the second region is ohmically connected to the substrate by the second gate pattern.
公开/授权文献
- US08344437B2 Semiconductor device with vertical channel transistor 公开/授权日:2013-01-01
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