发明申请
US20120088027A1 ANALOG INTERFEROMETRIC MODULATOR DEVICE WITH ELECTROSTATIC ACTUATION AND RELEASE
审中-公开
具有静电驱动和释放功能的模拟干涉仪调制器
- 专利标题： ANALOG INTERFEROMETRIC MODULATOR DEVICE WITH ELECTROSTATIC ACTUATION AND RELEASE
- 专利标题（中）： 具有静电驱动和释放功能的模拟干涉仪调制器
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申请号： US13327675申请日： 2011-12-15
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公开(公告)号： US20120088027A1公开(公告)日： 2012-04-12
- 发明人: Manish Kothari , Lior Kogut , Jeffrey B. Sampsell
- 申请人： Manish Kothari , Lior Kogut , Jeffrey B. Sampsell
- 申请人地址： US CA San Diego
- 专利权人： QUALCOMM MEMS TECHNOLOGIES, INC.
- 当前专利权人： QUALCOMM MEMS TECHNOLOGIES, INC.
- 当前专利权人地址： US CA San Diego
- 主分类号： B05D5/12
- IPC分类号： B05D5/12
摘要：
Examples of methods of manufacturing a microelectromechanical system (MEMS) device can include forming a first reflective layer on a substrate, forming a sacrificial layer over the first reflective layer, removing a portion of the sacrificial layer to form an opening, and filling the opening with a dielectric material to form a post. Some methods further include forming a second reflective layer over the sacrificial layer, removing a portion of the second reflective layer and a portion of the post to form a hole, filling the hole with a conductive material to form an electrode, and removing the sacrificial layer.
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