发明申请
- 专利标题: FLOW RATE DETECTION DEVICE
- 专利标题(中): 流量检测装置
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申请号: US13070131申请日: 2011-03-23
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公开(公告)号: US20120103087A1公开(公告)日: 2012-05-03
- 发明人: Taiki NAKANISHI , Hiromoto INOUE , Yoshitatsu KAWAMA
- 申请人: Taiki NAKANISHI , Hiromoto INOUE , Yoshitatsu KAWAMA
- 申请人地址: JP Tokyo
- 专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-244024 20101029
- 主分类号: G01F3/00
- IPC分类号: G01F3/00
摘要:
The flow rate detection device includes a sensor element and a support. The sensor element includes: a cavity which is formed in a rear surface of a plate-shaped semiconductor silicon substrate by removing part of the plate-shaped semiconductor silicon substrate; and a thin film portion which is disposed over the cavity and includes a detecting element. The support includes a fitting portion into which the sensor element is to be disposed. The sensor element is supported to the fitting portion by an adhesive in a floating manner. A gap formed between the sensor element and the fitting portion is filled with an anti-undercurrent material. The sensor element has a texture including protrusions and depressions formed on a surface opposed to the fitting portion, and the anti-undercurrent material is brought into contact with the texture.
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