Invention Application
US20120107991A1 MAGNESIUM DOPING IN BARRIERS IN MULTIPLE QUANTUM WELL STRUCTURES OF III-NITRIDE-BASED LIGHT EMITTING DEVICES
审中-公开
在氮化物发光器件的多个量子结构中的障碍物中的磁珠
- Patent Title: MAGNESIUM DOPING IN BARRIERS IN MULTIPLE QUANTUM WELL STRUCTURES OF III-NITRIDE-BASED LIGHT EMITTING DEVICES
- Patent Title (中): 在氮化物发光器件的多个量子结构中的障碍物中的磁珠
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Application No.: US13279121Application Date: 2011-10-21
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Publication No.: US20120107991A1Publication Date: 2012-05-03
- Inventor: Chia-Yen Huang , Shuji Nakamura , Steven P. DenBaars , James S. Speck
- Applicant: Chia-Yen Huang , Shuji Nakamura , Steven P. DenBaars , James S. Speck
- Applicant Address: US CA Oakland
- Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee Address: US CA Oakland
- Main IPC: H01L33/06
- IPC: H01L33/06 ; H01S5/343 ; H01L21/18

Abstract:
A III-nitride-based light emitting device having a multiple quantum well (MQW) structure and a method for fabricating the device, wherein at least one barrier in the MQW structure is doped with magnesium (Mg). The Mg doping of the barrier is accomplished by introducing a bis(cyclopentadienyl)magnesium (Cp2Mg) flow during growth of the barrier using metalorganic chemical vapor deposition (MOCVD). The barriers of the MQW structure may be undoped, fully Mg-doped or partially Mg-doped. When the barrier is partially Mg-doped, only portions of the barrier are Mg-doped to prevent Mg diffusion into quantum wells of the MQW structure. The Mg-doped barriers preferably are high Al composition AlGaN barriers in nonpolar or semipolar devices.
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