发明申请
- 专利标题: RESISTIVE RANDOM ACCESS MEMORY AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 电阻随机存取存储器及其制造方法
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申请号: US13346935申请日: 2012-01-10
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公开(公告)号: US20120108031A1公开(公告)日: 2012-05-03
- 发明人: Ming-Daou LEE , Chia-Hua Ho , Erh-Kun Lai , Kuang-Yeu Hsieh
- 申请人: Ming-Daou LEE , Chia-Hua Ho , Erh-Kun Lai , Kuang-Yeu Hsieh
- 申请人地址: TW Hsin-Chu
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
A resistive random access memory including, an insulating layer, a hard mask layer, a bottom electrode, a memory cell and a top electrode is provided. The insulating layer is disposed on the bottom electrode. The insulating layer has a contact hole having a first width. The hard mask layer has an opening. A portion of the memory cell is exposed from the opening and has a second width smaller than the first width. The top electrode is disposed on the insulating layer and is coupled with the memory cell.
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