发明申请
- 专利标题: MEASUREMENT APPARATUS
- 专利标题(中): 测量装置
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申请号: US13292192申请日: 2011-11-09
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公开(公告)号: US20120113434A1公开(公告)日: 2012-05-10
- 发明人: Takumi TOKIMITSU , Yoshiyuki KURAMOTO
- 申请人: Takumi TOKIMITSU , Yoshiyuki KURAMOTO
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-251278 20101109
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
A measurement apparatus which measures a distance between a reference surface and a test surface, comprises a light source unit including a plurality of light sources each corresponding to one of a plurality of wavelength scanning ranges and each continuously scans a wavelength of generated light in the corresponding wavelength scanning range, an interferometer unit which splits light emitted by each of the plurality of light sources into reference light and test light, and detects, as an interference signal, an interference fringe formed by the reference light and the test light, and a processor which determines a slope of a phase of the interference signal with respect to wave number of the light based on the interference signal detected by the interferometer unit for each of the plurality of wavelength scanning ranges, and determines the distance from the slope of the phase.
公开/授权文献
- US08797542B2 Measurement apparatus 公开/授权日:2014-08-05
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