公开(公告)号：US20120113434A1

公开(公告)日：2012-05-10

申请号：US13292192

申请日：2011-11-09

申请人： Takumi TOKIMITSU ,  Yoshiyuki KURAMOTO

发明人： Takumi TOKIMITSU ,  Yoshiyuki KURAMOTO

IPC分类号： G01B11/02

CPC分类号： G01B9/02007 ,  G01B9/02004 ,  G01B9/02027 ,  G01B9/0207 ,  G01B9/02083 ,  G01B2290/45

摘要： A measurement apparatus which measures a distance between a reference surface and a test surface, comprises a light source unit including a plurality of light sources each corresponding to one of a plurality of wavelength scanning ranges and each continuously scans a wavelength of generated light in the corresponding wavelength scanning range, an interferometer unit which splits light emitted by each of the plurality of light sources into reference light and test light, and detects, as an interference signal, an interference fringe formed by the reference light and the test light, and a processor which determines a slope of a phase of the interference signal with respect to wave number of the light based on the interference signal detected by the interferometer unit for each of the plurality of wavelength scanning ranges, and determines the distance from the slope of the phase.

摘要翻译： 测量参考表面和测试表面之间的距离的测量装置包括光源单元，其包括多个光源，每个光源对应于多个波长扫描范围中的一个，并且每个光源单元连续地扫描相应的 波长扫描范围，将由所述多个光源中的每一个发射的光分解为参考光和测试光的干涉仪单元，并且检测由所述参考光和所述测试光形成的干涉条纹作为干涉信号;以及处理器 其基于由所述干涉仪单元为所述多个波长扫描范围中的每一个检测的干涉信号，确定相对于所述光的波数的所述干扰信号的相位的斜率，并且确定所述相位的斜率的距离。

公开(公告)号：US20130063728A1

公开(公告)日：2013-03-14

申请号：US13615972

申请日：2012-09-14

申请人： Yoshiyuki KURAMOTO

发明人： Yoshiyuki KURAMOTO

IPC分类号： G01B9/02

CPC分类号： G01B9/02008 ,  G01B9/02002 ,  G01B9/02014 ,  G01B9/02065 ,  G01B9/02069 ,  G01B9/0209 ,  G01B11/2441 ,  G01B2290/60 ,  G01B2290/70

摘要： A measuring apparatus includes an optical frequency comb source configured to emit an optical frequency comb in which a plurality of frequency components are arranged at equal frequency intervals, a beam splitter configured to split a beam emitted from the optical frequency comb source into a test beam to be irradiated onto a test surface and a reference beam to be irradiated onto a reference surface, an optical path difference changing element configured to change an optical path difference between the reference beam and the test beam, an image sensor configured to capture an interference pattern formed by interference between the test beam and the reference beam, and an analyzer configured to calculate a position of the test surface based upon a signal of the interference pattern captured while the optical path length difference is being changed by the optical path difference changing element.

摘要翻译： 一种测量装置，包括：光频梳状源，被配置为发射其中多个频率分量以相等的频率间隔排列的光学频率梳;分束器，被配置为将从所述光频梳状源发射的光束分成试验光束 被照射到要照射到参考表面的测试表面和参考光束上，光程差变化元件被配置为改变参考光束和测试光束之间的光程差，被配置为捕获形成的干涉图案的图像传感器 通过所述测试光束和所述参考光束之间的干涉，以及分析器，被配置为基于所述光路长度差由所述光程差变化元件改变而基于所捕获的所述干涉图案的信号来计算所述测试面的位置。

公开(公告)号：US20120044500A1

公开(公告)日：2012-02-23

申请号：US13209497

申请日：2011-08-15

申请人： Yoshiyuki KURAMOTO ,  Takamasa SASAKI

发明人： Yoshiyuki KURAMOTO ,  Takamasa SASAKI

IPC分类号： G01B9/02

CPC分类号： G01B9/02027 ,  G01B9/02007 ,  G01B9/0207 ,  G01B2290/45 ,  G01B2290/60

摘要： An optical interferometer including, an analyzer configured to calculate an air dispersion ratio of air in the dispersion measurement interferometer excluding the component gas on the basis of a detection result of a first partial pressure detector, to calculate dispersion of air in a distance measurement interferometer from the calculated air dispersion ratio and a detection result of a second partial pressure detector, and to calculate a geometrical distance of the optical path length difference between a reference surface and a target surface.

摘要翻译： 一种光学干涉仪，包括：分析器，被配置为基于第一分压检测器的检测结果计算除了组分气体之外的分散测量干涉仪中的空气的空气弥散比，以计算距离测量干涉仪中的空气的分散度 计算出的空气分散比和第二分压检测器的检测结果，并计算参考表面和目标表面之间的光程长度差的几何距离。

公开(公告)号：US20110216326A1

公开(公告)日：2011-09-08

申请号：US13038683

申请日：2011-03-02

申请人： Takamasa SASAKI ,  Yoshiyuki KURAMOTO

发明人： Takamasa SASAKI ,  Yoshiyuki KURAMOTO

IPC分类号： G01B11/02

CPC分类号： G01B11/02

摘要： A lightwave interference measurement apparatus includes a phase detector configured to detect a phase of a signal of an interference between light from a distance-measurement light source and reflected on a reference surface and light from the distance-measurement light source and reflected on a target surface, an intensity detector configured to detect an intensity of light from a non-distance-measurement light source having a wavelength different from that of the distance-measurement light source and reflected on the reference surface and an intensity of light from the non-distance-measurement light source and reflected on the target surface, and an analyzer configured to calculate a geometric distance based on an optical path length calculated from the phase and a wavelength of the distance-measurement light source, and an average value of a vapor pressure distribution between the target surface and the reference surface calculated from intensity information of the light from the non-distance-measurement light source.

摘要翻译： 光波干涉测量装置包括：相位检测器，被配置为检测来自距离测量光源并在参考表面上反射的光之间的干涉信号的相位和来自距离测量光源的光并在目标表面上反射的相位 强度检测器，其被配置为检测来自所述距离测量光源的波长不同于在所述基准面上反射的波长的非距离测量光源的光强度， 测量光源并在目标表面上反射;以及分析器，被配置为基于从距离测量光源的相位和波长计算的光程长度以及基于距离测量光源的波长的平均值， 目标表面和参考表面根据来自no的光的强度信息计算 n距离测量光源。

公开(公告)号：US20090316123A1

公开(公告)日：2009-12-24

申请号：US12548100

申请日：2009-08-26

申请人： Yoshiyuki KURAMOTO

发明人： Yoshiyuki KURAMOTO

IPC分类号： G03B27/68 ,  H01S3/098 ,  G01B9/02

CPC分类号： H01S3/1394 ,  G03F7/706 ,  H01S3/005 ,  H01S3/083 ,  H01S3/094038 ,  H01S3/10092 ,  H01S3/1305 ,  H01S3/1392 ,  H01S3/1398

摘要： An injection-locked laser is disclosed. The injection-locked laser comprises a seed laser, an oscillator into which a certain component of light output from the seed laser is injected as seed laser light, a frequency converter which shifts a frequency of the remaining component of the light output from the seed laser, a photodetector which detects light obtained by synthesizing the light output from the oscillator and the light output from the frequency converter, and a controller which controls an optical path length of the oscillator based on a beat signal component contained in the signal output from the photodetector.

摘要翻译： 公开了一种注射锁定激光器。 注入锁定激光器包括种子激光器，将从种子激光器输出的特定分量的光注入其中的振荡器作为种子激光，将从种子激光器输出的光的剩余分量的频率偏移的频率转换器 检测通过合成从振荡器输出的光和从变频器输出的光获得的光的光检测器，以及基于从光电检测器输出的信号中包含的拍频信号成分来控制振荡器的光路长度的控制器 。

公开(公告)号：US20120116718A1

公开(公告)日：2012-05-10

申请号：US13289561

申请日：2011-11-04

申请人： Taro TEZUKA ,  Yoshiyuki KURAMOTO ,  Yusuke KODA

发明人： Taro TEZUKA ,  Yoshiyuki KURAMOTO ,  Yusuke KODA

IPC分类号： G01B11/14 ,  G06F15/00

CPC分类号： G01B9/02005 ,  G01B9/02003 ,  G01B9/02067 ,  G01B9/0207 ,  G01B9/02076

摘要： The present invention provides a measurement apparatus which measures a distance between a reference surface and a surface to be measured, including a wavelength reference element configured to include a gas cell in which a plurality of types of gases having absorption lines different from each other are sealed, and a processing unit configured to set a wavelength of light emitted by a light source to a plurality of different wavelengths corresponding to a plurality of different absorption lines by using the wavelength reference element, control a phase detection unit to detect a phase corresponding to an optical path length between the reference surface and the surface to be measured for each of the plurality of different wavelengths, and perform processing of obtaining the distance.

摘要翻译： 本发明提供一种测量装置，其测量参考表面和被测量表面之间的距离，包括波长参考元件，该波长参考元件被配置为包括其中具有彼此不同的吸收线的多种类型的气体被密封的气室 以及处理单元，其被配置为通过使用所述波长参考元件将由光源发射的光的波长设置为对应于多个不同吸收线的多个不同波长，控制相位检测单元以检测对应于 对于多个不同波长中的每一个，参考表面和要测量的表面之间的光程长度，并且执行获得距离的处理。