发明申请
US20120126038A1 NOZZLE AND METHOD OF MAKING SAME 有权
喷嘴及其制作方法

NOZZLE AND METHOD OF MAKING SAME
摘要:
Nozzle and a method of making the same are disclosed. The method includes the steps of: (a) providing a first material that is capable of undergoing multiphoton reaction; (b) forming a first microstructured pattern in the first material using a multiphoton process; (c) replicating the first microstructured pattern in a second material that is different than the first material to make a first mold that includes a second microstructured pattern in the second material; (d) replicating the second microstructured pattern in a third material different than the first and second materials to make a second mold that includes a third microstructured pattern that includes a plurality of microstructures in the third material; (e) planarizing the third microstructured pattern of the second mold with a layer of a fourth material different than the third material, where the layer exposes tops of the microstructures in the plurality of microstructures in the third microstructured pattern; and (f) removing the third material resulting in a nozzle that includes a plurality of holes in the fourth material, where the holes correspond to the plurality of microstructures in the third microstructured pattern.
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