Invention Application
- Patent Title: PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
- Patent Title (中): PVD目标终止服务生命检测能力
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Application No.: US13356950Application Date: 2012-01-24
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Publication No.: US20120131784A1Publication Date: 2012-05-31
- Inventor: Yi-Li Hsiao , Chen-Hua Yu , Jean Wang , Lawrance Sheu
- Applicant: Yi-Li Hsiao , Chen-Hua Yu , Jean Wang , Lawrance Sheu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: B23P11/00
- IPC: B23P11/00

Abstract:
A method for forming a tube-based detector for signaling when a PVD target is reduced to a predetermined quantity of the PVD target material includes providing a mold member having an inner molding member and an outer molding member defining a space therebetween, melting a desired tube material, injecting the molten tube material into the space between the inner molding member and the outer molding member, cooling the molten tube material, removing the tube from the mold member after the molten tube material has cooled and solidified into a tube, embedding the tube in the physical vapor deposition target, wherein the tube forms an enclosure of the tube-based detector.
Public/Granted literature
- US08276648B2 PVD target with end of service life detection capability Public/Granted day:2012-10-02
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