Invention Application
US20120131784A1 PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY 有权
PVD目标终止服务生命检测能力

PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
Abstract:
A method for forming a tube-based detector for signaling when a PVD target is reduced to a predetermined quantity of the PVD target material includes providing a mold member having an inner molding member and an outer molding member defining a space therebetween, melting a desired tube material, injecting the molten tube material into the space between the inner molding member and the outer molding member, cooling the molten tube material, removing the tube from the mold member after the molten tube material has cooled and solidified into a tube, embedding the tube in the physical vapor deposition target, wherein the tube forms an enclosure of the tube-based detector.
Public/Granted literature
Information query
Patent Agency Ranking
0/0