Invention Application
- Patent Title: CADMIUM STANNATE SPUTTER
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Application No.: US13171987Application Date: 2011-06-29
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Publication No.: US20120132261A1Publication Date: 2012-05-31
- Inventor: Benyamin Buller , Douglas Dauson , Scott Mills , Dale Roberts , Yu Yang , Zhibo Zhao , Keith Burrows , Klaus Hartig , Annette Krisko
- Applicant: Benyamin Buller , Douglas Dauson , Scott Mills , Dale Roberts , Yu Yang , Zhibo Zhao , Keith Burrows , Klaus Hartig , Annette Krisko
- Main IPC: H01L31/048
- IPC: H01L31/048 ; H01L31/0224

Abstract:
A structure includes a barrier layer which can include a silicon aluminum oxide, and a transparent conductive oxide layer which can include a layer of cadmium and tin.
Information query
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