发明申请
- 专利标题: CADMIUM STANNATE SPUTTER
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申请号: US13171987申请日: 2011-06-29
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公开(公告)号: US20120132261A1公开(公告)日: 2012-05-31
- 发明人: Benyamin Buller , Douglas Dauson , Scott Mills , Dale Roberts , Yu Yang , Zhibo Zhao , Keith Burrows , Klaus Hartig , Annette Krisko
- 申请人: Benyamin Buller , Douglas Dauson , Scott Mills , Dale Roberts , Yu Yang , Zhibo Zhao , Keith Burrows , Klaus Hartig , Annette Krisko
- 主分类号: H01L31/048
- IPC分类号: H01L31/048 ; H01L31/0224
摘要:
A structure includes a barrier layer which can include a silicon aluminum oxide, and a transparent conductive oxide layer which can include a layer of cadmium and tin.
信息查询
IPC分类: