Invention Application
- Patent Title: PROCESS TOOL CHEMICAL AND GAS USAGE OPTIMIZATION
- Patent Title (中): 过程工具化学和气体使用优化
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Application No.: US13308124Application Date: 2011-11-30
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Publication No.: US20120143574A1Publication Date: 2012-06-07
- Inventor: Krishna Vepa , Parris C.M. Hawkins , Andreas Neuber
- Applicant: Krishna Vepa , Parris C.M. Hawkins , Andreas Neuber
- Main IPC: G06F17/10
- IPC: G06F17/10
Abstract:
A resource usage optimization server determines a degradation caused by a first resource. The resource usage optimization server determines a cleaning caused by a second resource. The resource usage optimization server calculates a ratio of the degradation and the cleaning.
Public/Granted literature
- US08874416B2 Process tool chemical and gas usage optimization Public/Granted day:2014-10-28
Information query
