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    Method and apparatus for controlling a processing system
    1.
    发明授权
    Method and apparatus for controlling a processing system 有权
    用于控制处理系统的方法和装置

    公开(公告)号：US09080576B2

    公开(公告)日：2015-07-14

    申请号：US13359899

    申请日：2012-01-27

    Applicant: Youssef Loldj ,  Jay J. Jung ,  Mehran Moalem ,  Paul E. Fisher ,  Joshua Putz ,  Andreas Neuber

    Inventor： Youssef Loldj ,  Jay J. Jung ,  Mehran Moalem ,  Paul E. Fisher ,  Joshua Putz ,  Andreas Neuber

    IPC: F04B49/06 ,  F04D27/00 ,  F04D19/04 ,  F17D3/00

    CPC classification number: F04D27/004 ,  F04D19/04 ,  F17D3/00 ,  H01L21/67017 ,  H01L21/6719 ,  H01L21/67253 ,  Y10T137/0396

    Abstract: Methods and apparatus for controlling a processing system are provided herein. In some embodiments, a method of controlling a processing system may include operating a vacuum pump coupled to a process chamber at a first baseline pump idle speed selected to maintain the process chamber at a pressure equal to a first baseline pump idle pressure; monitoring the pressure in the process chamber while operating the vacuum pump at the first baseline pump idle speed; and determining whether the first baseline pump idle pressure can be maintained in the process chamber when the vacuum pump is operating at the first baseline pump idle speed.

    Abstract translation: 本文提供了用于控制处理系统的方法和装置。 在一些实施例中，一种控制处理系统的方法可以包括以选择为将处理室维持在等于第一基准泵空闲压力的压力的第一基准泵空转速度下操作联接到处理室的真空泵; 在第一基准泵怠速下操作真空泵时监测处理室中的压力; 以及当所述真空泵以所述第一基准泵怠速运转时，确定所述处理室中是否能够维持所述第一基准泵怠速压力。

    METHODS AND APPARATUS FOR RECOVERY AND REUSE OF REAGENTS
    3.
    发明申请
    METHODS AND APPARATUS FOR RECOVERY AND REUSE OF REAGENTS 审中-公开
    回收和再次使用试剂的方法和装置

    公开(公告)号：US20120091099A1

    公开(公告)日：2012-04-19

    申请号：US13238721

    申请日：2011-09-21

    Applicant: MICHAEL KIEFER ,  ANDREAS NEUBER ,  DENIS DAVID ,  DANIEL O. CLARK ,  PHIL CHANDLER

    Inventor： MICHAEL KIEFER ,  ANDREAS NEUBER ,  DENIS DAVID ,  DANIEL O. CLARK ,  PHIL CHANDLER

    IPC: C23F1/00 ,  B08B3/08 ,  B08B7/00 ,  C23F1/08

    CPC classification number: H01L21/67017

    Abstract: Methods and apparatus for recovery and reuse of reagents are provided herein. In some embodiments, a system for processing substrates may include a process chamber for processing a substrate; a reagent source coupled to the process chamber to provide a reagent to the process chamber; and a reagent recovery system to collect, and at least one of purify or concentrate the reagent recovered from an effluent exhausted from the process chamber. In some embodiments, a method for recovering unreacted reagent may include providing reagent from a reagent source to a process chamber; exposing a substrate disposed in the process chamber to the reagent, forming an effluent; exhausting the effluent from the process chamber; and recovering unreacted reagent from the effluent in a reagent recovery system.

    Abstract translation: 本文提供了试剂的回收和再利用的方法和设备。 在一些实施例中，用于处理衬底的系统可以包括用于处理衬底的处理室; 耦合到处理室以向处理室提供试剂的试剂源; 以及试剂回收系统，用于收集从所述处理室排出的流出物中回收的试剂的净化或浓缩中的至少一种。 在一些实施方案中，用于回收未反应试剂的方法可包括将试剂从试剂源提供至处理室; 将设置在处理室中的衬底暴露于试剂，形成流出物; 从处理室排出污水; 以及在试剂回收系统中从流出物中回收未反应的试剂。

    FACTORY RESOURCE OPTIMIZATION IDENTIFICATION PROCESS AND SYSTEM
    4.
    发明申请
    FACTORY RESOURCE OPTIMIZATION IDENTIFICATION PROCESS AND SYSTEM 审中-公开
    工厂资源优化识别流程与系统

    公开(公告)号：US20100249968A1

    公开(公告)日：2010-09-30

    申请号：US12730969

    申请日：2010-03-24

    Applicant: Andreas Neuber ,  Parth Sethia ,  Parris C.M. Hawkins ,  Krishna Vepa ,  Raymond Murray

    Inventor： Andreas Neuber ,  Parth Sethia ,  Parris C.M. Hawkins ,  Krishna Vepa ,  Raymond Murray

    IPC: G06F19/00 ,  G06F3/048

    CPC classification number: G06Q50/04 ,  G06Q10/06 ,  Y02P90/30

    Abstract: A method and system for factory resource optimization identification is described herein. In one embodiment, an expected usage rate is determined for a resource in a manufacturing facility and an actual usage rate is determined for the resource in the manufacturing facility. A comparison between the expected usage rate and the actual usage rate is facilitated. A determination is made, based on the comparison, of whether a variance between the expected usage rate and the actual usage rate exceeds a threshold. A notification is provided if the variance exceeds the threshold.

    Abstract translation: 本文描述了用于工厂资源优化识别的方法和系统。 在一个实施例中，为制造设施中的资源确定预期使用率，并且确定制造设施中的资源的实际使用率。 预期使用率与实际使用率之间的比较是有利的。 基于比较来确定预期使用率和实际使用率之间的差异是否超过阈值。 如果方差超过阈值，则提供通知。

    METHODS AND APPARATUS FOR PROCESS ABATEMENT WITH RECOVERY AND REUSE OF ABATEMENT EFFLUENT
    5.
    发明申请
    METHODS AND APPARATUS FOR PROCESS ABATEMENT WITH RECOVERY AND REUSE OF ABATEMENT EFFLUENT 审中-公开
    回收再利用过程退出方法和装置

    公开(公告)号：US20110023908A1

    公开(公告)日：2011-02-03

    申请号：US12838146

    申请日：2010-07-16

    Applicant: ANDREAS NEUBER ,  PHIL CHANDLER ,  CLIFFORD C. STOW ,  DANIEL O. CLARK ,  MICHAEL KIEFER

    Inventor： ANDREAS NEUBER ,  PHIL CHANDLER ,  CLIFFORD C. STOW ,  DANIEL O. CLARK ,  MICHAEL KIEFER

    IPC: B01D53/73 ,  B08B7/00 ,  H01L21/30 ,  B01J19/00 ,  B01D53/68

    CPC classification number: B08B7/0035 ,  B01D53/68 ,  B01D53/73 ,  B01D2257/2047 ,  C23C16/4405

    Abstract: Methods and apparatus for recovering hydrogen fluoride (HF) are provided herein. In some embodiments, an apparatus includes a system for processing substrates, including a process chamber for processing a substrate; a fluorine generator coupled to the process chamber to provide fluorine (F2) thereto; an abatement system coupled to the process chamber to abate fluorine-containing effluents exhausted from the process chamber and to convert at least a portion of the fluorine-containing effluents into hydrogen fluoride (HF); an HF recovery system configured to at least one of collect, purify, or concentrate the HF converted by the abatement system; and a conduit for providing the recovered hydrogen fluoride (HF) to the fluorine generator or another application in the manufacturing process.

    Abstract translation: 本文提供了回收氟化氢（HF）的方法和装置。 在一些实施例中，一种装置包括用于处理衬底的系统，包括用于处理衬底的处理室; 耦合到所述处理室以向其提供氟（F2）的氟发生器; 耦合到处理室的减排系统以消除从处理室排出的含氟流出物并将至少一部分含氟流出物转化为氟化氢（HF）; HF回收系统，被配置为收集，净化或集中由减排系统转换的HF中的至少一个; 以及用于在制造过程中将回收的氟化氢（HF）提供给氟发生器或其他应用的导管。

    METHOD AND APPARATUS FOR CONTROLLING A PROCESSING SYSTEM
    8.
    发明申请
    METHOD AND APPARATUS FOR CONTROLLING A PROCESSING SYSTEM 有权
    用于控制加工系统的方法和装置

    公开(公告)号：US20120204965A1

    公开(公告)日：2012-08-16

    申请号：US13359899

    申请日：2012-01-27

    Applicant: YOUSSEF LOLDJ ,  JAY J. JUNG ,  MEHRAN MOALEM ,  PAUL E. FISHER ,  JOSHUA PUTZ ,  ANDREAS NEUBER

    Inventor： YOUSSEF LOLDJ ,  JAY J. JUNG ,  MEHRAN MOALEM ,  PAUL E. FISHER ,  JOSHUA PUTZ ,  ANDREAS NEUBER

    IPC: F17D3/00

    CPC classification number: F04D27/004 ,  F04D19/04 ,  F17D3/00 ,  H01L21/67017 ,  H01L21/6719 ,  H01L21/67253 ,  Y10T137/0396

    Abstract: Methods and apparatus for controlling a processing system are provided herein. In some embodiments, a method of controlling a processing system may include operating a vacuum pump coupled to a process chamber at a first baseline pump idle speed selected to maintain the process chamber at a pressure equal to a first baseline pump idle pressure; monitoring the pressure in the process chamber while operating the vacuum pump at the first baseline pump idle speed; and determining whether the first baseline pump idle pressure can be maintained in the process chamber when the vacuum pump is operating at the first baseline pump idle speed.

    Abstract translation: 本文提供了用于控制处理系统的方法和装置。 在一些实施例中，一种控制处理系统的方法可以包括以选择为将处理室维持在等于第一基准泵空闲压力的压力的第一基准泵空转速度下操作联接到处理室的真空泵; 在第一基准泵怠速下操作真空泵时监测处理室中的压力; 以及当所述真空泵以所述第一基准泵怠速运转时，确定所述处理室中是否能够维持所述第一基准泵怠速压力。

    METHODS AND APPARATUS FOR RECOVERING HEAT FROM PROCESSING SYSTEMS
    9.
    发明申请
    METHODS AND APPARATUS FOR RECOVERING HEAT FROM PROCESSING SYSTEMS 审中-公开
    从加工系统回收热量的方法和装置

    公开(公告)号：US20100096110A1

    公开(公告)日：2010-04-22

    申请号：US12579472

    申请日：2009-10-15

    Applicant: Andreas Neuber ,  Daniel O. Clark

    Inventor： Andreas Neuber ,  Daniel O. Clark

    IPC: F28D15/00 ,  F25B30/00

    CPC classification number: H01L21/67017 ,  Y02P70/605

    Abstract: Methods and apparatus for recovering heat from disposed effluents are disclosed herein. In some embodiments, an apparatus may include a first process chamber configured for gaseous or liquid processes; a second process chamber configured for liquid processes; and a heat pump having a compressor and a first heat exchanger, wherein the compressor is configured to use a first effluent exhausted from the first process chamber and wherein the first heat exchanger having first and second sides configured to transfer heat therebetween, wherein the first side is configured to flow a liquid reagent therethrough and into the second process chamber, and wherein the second side is configured to flow the pressurized first effluent from the first process chamber therethrough. In some embodiments, a heater may be disposed between the heat pump and the second process chamber to further heat the liquid reagent prior to entering the second process chamber.

    Abstract translation: 本文公开了从处置的废水中回收热量的方法和装置。 在一些实施例中，装置可以包括被配置用于气态或液体过程的第一处理室; 配置用于液体处理的第二处理室; 以及具有压缩机和第一热交换器的热泵，其中所述压缩机构造成使用从所述第一处理室排出的第一流出物，并且其中所述第一热交换器具有被配置为在其间传热的第一和第二侧，其中所述第一侧 被配置为使液体试剂流过其中并进入第二处理室，并且其中第二侧构造成使来自第一处理室的加压的第一流出物流过其中。 在一些实施例中，加热器可以设置在热泵和第二处理室之间，以在进入第二处理室之前进一步加热液体试剂。

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