发明申请
- 专利标题: SUBSTRATE LIQUID PROCESSING APPARATUS
- 专利标题(中): 基板液体加工设备
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申请号: US13151665申请日: 2011-06-02
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公开(公告)号: US20120153044A1公开(公告)日: 2012-06-21
- 发明人: Nobuhiro Ogata , Shuichi Nagamine
- 申请人: Nobuhiro Ogata , Shuichi Nagamine
- 申请人地址: JP Minato-Ku
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Minato-Ku
- 优先权: JP2010-281793 20101217
- 主分类号: B05B3/02
- IPC分类号: B05B3/02
摘要:
A substrate liquid processing apparatus of the present invention includes a guide rotary cup configured to guide a process-liquid scattering from a substrate rotating and being held by a substrate holding table and a guide cup configured to guide downward the process-liquid guided by the guide rotary cup. The guide cup includes a downward extension portion extending downward from an inner peripheral end portion of a guide cup body and an inner peripheral extension portion extending inward from the inner peripheral end portion more than the downward extension portion. The inner peripheral extension portion is configured to form a gas guide space together with the guide rotary cup and the downward extension portion so that a gas turning by the rotation of the guide rotary cup can be guided downward.
公开/授权文献
- US08539906B2 Substrate liquid processing apparatus 公开/授权日:2013-09-24
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