发明申请
US20120153287A1 ETCHANT, DISPLAY DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME
有权
蚀刻剂,显示装置和使用其制造显示装置的方法
- 专利标题: ETCHANT, DISPLAY DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME
- 专利标题(中): 蚀刻剂,显示装置和使用其制造显示装置的方法
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申请号: US13168408申请日: 2011-06-24
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公开(公告)号: US20120153287A1公开(公告)日: 2012-06-21
- 发明人: Hong-Sick PARK , Wang-Woo LEE , Sang-Tae KIM , Joon-Woo LEE , Young-Chul PARK , Young-Jun JIN , Kyong-Min KANG , Young-Jin YOON , Suck-Jun LEE , O-Byoung KWON , In-Ho YU , Sang-Hoon JANG , Min-Ki LIM , Dong-Ki KIM
- 申请人: Hong-Sick PARK , Wang-Woo LEE , Sang-Tae KIM , Joon-Woo LEE , Young-Chul PARK , Young-Jun JIN , Kyong-Min KANG , Young-Jin YOON , Suck-Jun LEE , O-Byoung KWON , In-Ho YU , Sang-Hoon JANG , Min-Ki LIM , Dong-Ki KIM
- 申请人地址: KR Iksan-si KR Suwon-si
- 专利权人: DONGWOO FINE-CHEM CO., LTD.,SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: DONGWOO FINE-CHEM CO., LTD.,SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Iksan-si KR Suwon-si
- 优先权: KR10-2010-0128314 20101215
- 主分类号: H01L33/16
- IPC分类号: H01L33/16 ; C09K13/08 ; C09K13/06
摘要:
An etchant includes: 5 to 20 wt % of persulfate, 1 to 10 wt % of at least one compound of an inorganic acid, an inorganic acid salt, or a mixture thereof, 0.3 to 5 wt % of a cyclic amine compound, 1 to 10 wt % of at least one compound of an organic acid, an organic acid salt, or a mixture thereof, 0.1 to 5 wt % of p-toluenesulfonic acid, and water, based on the total weight of the etchant. A copper-titanium etchant further includes 0.01 to 2 wt % of a fluoride-containing compound. A method of forming a display device using the etchant, and a display device, are also disclosed.
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