发明申请
US20120158379A1 SIMULATOR, PROCESSING SYSTEM, DAMAGE EVALUATION METHOD AND DAMAGE EVALUATION PROGRAM
有权
模拟器，处理系统，损害评估方法和损害评估方案
- 专利标题： SIMULATOR, PROCESSING SYSTEM, DAMAGE EVALUATION METHOD AND DAMAGE EVALUATION PROGRAM
- 专利标题（中）： 模拟器，处理系统，损害评估方法和损害评估方案
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申请号： US13323373申请日： 2011-12-12
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公开(公告)号： US20120158379A1公开(公告)日： 2012-06-21
- 发明人: Nobuyuki Kuboi , Tetsuya Tatsumi
- 申请人： Nobuyuki Kuboi , Tetsuya Tatsumi
- 申请人地址： JP Tokyo
- 专利权人： Sony Corporation
- 当前专利权人： Sony Corporation
- 当前专利权人地址： JP Tokyo
- 优先权： JP2010-284130 20101221
- 主分类号： G06F17/10
- IPC分类号： G06F17/10
摘要：
Disclosed herein is a simulator including: an input section adapted to acquire processing conditions for a given process performed on a workpiece; and a damage calculation section adapted to acquire the damage of the workpiece, based on the processing conditions, by calculating, using a Flux method, the relationship between the amount of a first substance externally injected onto a given evaluation point on the workpiece during the given process and the amount of a second substance released from the given evaluation point on the workpiece as a result of the injection of the first substance.
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