发明申请
- 专利标题: APPARATUS FOR MANUFACTURING A THIN FILM LAMINATE
- 专利标题(中): 用于制造薄膜层压板的装置
-
申请号: US13388609申请日: 2010-08-04
-
公开(公告)号: US20120160165A1公开(公告)日: 2012-06-28
- 发明人: Masanori Nishizawa , Shoji Yokoyama , Takanori Yamada
- 申请人: Masanori Nishizawa , Shoji Yokoyama , Takanori Yamada
- 申请人地址: JP Kawasaki-shi, Kanagawa
- 专利权人: FUJI ELECTRIC CO., LTD
- 当前专利权人: FUJI ELECTRIC CO., LTD
- 当前专利权人地址: JP Kawasaki-shi, Kanagawa
- 优先权: JP2009-183315 20090806
- 国际申请: PCT/JP2010/063151 WO 20100804
- 主分类号: C23C16/54
- IPC分类号: C23C16/54 ; C23C16/52
摘要:
An apparatus for manufacturing a thin-film laminate prevents loosening of a strip-shaped flexible substrate at the time of conveying or misalignment of the strip-shaped flexible substrate with respect to a winding roller at the time of winding. In the apparatus, a strip-shaped flexible substrate in a lateral direction is conveyed by positioning longitudinally the width direction of the strip-shaped flexible substrate wound in a roll shape. The apparatus includes a deposition device having a deposition chamber for forming a thin film on the strip-shaped flexible substrate, a winding roll for winding a thin-film laminate, and an adjustment roller to prevent a loosening or misalignment of the strip-shaped flexible substrate between a pair of grip rollers and the winding roll, and the pair of grip rollers arranged in front of the adjustment roller to convey the thin-film laminate while maintaining a given height.