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公开(公告)号：US20130199442A1
公开(公告)日：2013-08-08
申请号：US13138744
申请日：2010-12-07
IPC分类号： H01L21/683
CPC分类号： H01L21/683 , B65H20/02 , B65H23/025 , B65H23/0324 , B65H23/038 , B65H2301/323 , B65H2511/214 , B65H2511/216 , B65H2513/41 , B65H2701/175 , H01L21/67092
摘要： An apparatus (30) for control of the position of a flexible substrate (1) in the vertical width direction has first and second upper sandwiching roller pairs (31, 32) for sandwiching the upper edge of the flexible substrate while sending the flexible substrate. Rotation shafts of the first upper sandwiching rollers (31) are inclined so as to have a deflection angle (α) directed obliquely upward with respect to a first transport direction (F), in a sandwiching portion, of the flexible substrate, and rotation shafts of the second upper sandwiching rollers (32) are inclined so as to have a deflection angle (α) directed obliquely upward with respect to a second transport direction (R) opposite the first transport direction in a sandwiching portion. A switching device for switching the first and second upper sandwiching roller pairs (31, 32) between operative and inoperative states is provided.
摘要翻译： 用于控制柔性基板（1）沿垂直宽度方向的位置的装置（30）具有用于在发送柔性基板的同时夹持柔性基板的上边缘的第一和第二上夹持辊对（31,32）。 第一上部夹持辊（31）的旋转轴倾斜，以便在柔性基板的夹持部分中具有相对于第一输送方向（F）倾斜向上指向的偏转角（α），以及旋转轴 第二上部夹持辊（32）的倾斜角度倾斜，以便在夹持部分中具有相对于与第一输送方向相反的第二输送方向（R）倾斜向上指向的偏转角（α）。 提供了一种用于在第一和第二上部夹持辊对（31,32）之间切换操作和不工作状态的开关装置。
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公开(公告)号：US08528725B2
公开(公告)日：2013-09-10
申请号：US13512231
申请日：2010-12-02
IPC分类号： B65G15/12
CPC分类号： B65H20/02 , B65H2301/323 , B65H2801/87 , H01L21/67706 , H01L21/67721 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： A conveying device has a substrate conveying device for conveying a flexible substrate while holding the flexible substrate upright, with one end part in a width direction of the flexible substrate being on an upper side; and a substrate retaining device. The substrate retaining device has a pair of grip rollers; a support mechanism rotatably supporting the pair of grip rollers; a transmission mechanism transmitting a force to pressure contact one of the grip rollers with the other grip roller; a first driving device configured to adjust a pressure contact force of the pair of grip rollers; an angle adjusting mechanism configured to incline the pair of grip rollers with respect to a conveying direction of the flexible substrate; and a second driving device configured to adjust an inclination angle of the pair of grip rollers with respect to the conveying direction of the flexible substrate.
摘要翻译： 输送装置具有用于输送柔性基板的基板输送装置，同时将柔性基板保持直立，柔性基板的宽度方向上的一个端部位于上侧; 和基板保持装置。 基板保持装置具有一对夹持辊; 可旋转地支撑所述一对夹持辊的支撑机构; 传递机构，其传递力以与所述另一夹持辊压力接触所述夹持辊之一; 配置为调节所述一对夹持辊的压力接触力的第一驱动装置; 角度调节机构，其构造成相对于所述柔性基板的输送方向倾斜所述一对夹持辊; 以及第二驱动装置，其构造成调整所述一对夹持辊相对于柔性基板的输送方向的倾斜角度。
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公开(公告)号：US20130043294A1
公开(公告)日：2013-02-21
申请号：US13512213
申请日：2010-11-22
IPC分类号： B65H23/038 , B65H20/02
CPC分类号： B65H23/0324 , B65H9/166 , B65H23/038 , B65H2301/323 , B65H2403/942 , B65H2404/14212
摘要： A film substrate conveying device is a device for conveying a belt-like film substrate while placing the film substrate upright, with one end part thereof being on an upper side in a width direction thereof. The film substrate conveying device has at least a pair of first grip rollers disposed to sandwich an upper end part of the film substrate therebetween; and a first angle adjusting mechanism capable of adjusting an inclination direction and an inclination angle of the first grip rollers to be capable of inclining a rotation angle of the first grip rollers such that a rotation direction of the first grip rollers is on an upper side with respect to a conveying direction.
摘要翻译： 薄膜基板输送装置是在将薄膜基板竖直放置的同时输送带状薄膜基板的装置，其一端部位于其宽度方向的上侧。 薄膜基板输送装置具有设置成将薄膜基板的上端部夹在其间的至少一对第一夹持辊; 以及第一角度调节机构，其能够调节第一夹持辊的倾斜方向和倾斜角度，以能够使第一夹持辊的旋转角度倾斜，使得第一夹持辊的旋转方向在上侧， 相对于输送方向。
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公开(公告)号：US20120298298A1
公开(公告)日：2012-11-29
申请号：US13512231
申请日：2010-12-02
CPC分类号： B65H20/02 , B65H2301/323 , B65H2801/87 , H01L21/67706 , H01L21/67721 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： A conveying device has a substrate conveying device for conveying a flexible substrate while holding the flexible substrate upright, with one end part in a width direction of the flexible substrate being on an upper side; and a substrate retaining device. The substrate retaining device has a pair of grip rollers; a support mechanism rotatably supporting the pair of grip rollers; a transmission mechanism transmitting a force to pressure contact one of the grip rollers with the other grip roller; a first driving device configured to adjust a pressure contact force of the pair of grip rollers; an angle adjusting mechanism configured to incline the pair of grip rollers with respect to a conveying direction of the flexible substrate; and a second driving device configured to adjust an inclination angle of the pair of grip rollers with respect to the conveying direction of the flexible substrate.
摘要翻译： 输送装置具有用于输送柔性基板的基板输送装置，同时将柔性基板保持直立，柔性基板的宽度方向上的一个端部位于上侧; 和基板保持装置。 基板保持装置具有一对夹持辊; 可旋转地支撑所述一对夹持辊的支撑机构; 传递机构，其传递力以与所述另一夹持辊压力接触所述夹持辊之一; 配置为调节所述一对夹持辊的压力接触力的第一驱动装置; 角度调节机构，其构造成相对于所述柔性基板的输送方向倾斜所述一对夹持辊; 以及第二驱动装置，其构造成调整所述一对夹持辊相对于柔性基板的输送方向的倾斜角度。
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公开(公告)号：US20120247389A1
公开(公告)日：2012-10-04
申请号：US13393597
申请日：2010-11-29
IPC分类号： C23C16/46
CPC分类号： H01L21/6776 , B65H2301/323 , C23C16/46 , C23C16/545 , H01L21/67109 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： Provided is an apparatus for manufacturing a thin film stacked member capable of improving the quality of the thin film stacked member by decreasing creases, heat wrinkles, and tension wrinkles in the film through wrinkle smoothing-out. An apparatus for manufacturing a thin film stacked member transports a strip-shape flexible substrate in a horizontal direction with a width direction of the strip-shape flexible substrate as the vertical direction. The strip-shape flexible substrate is transported to a film deposition portion provided in a transport path of the strip-shape flexible substrate. A thin film is stacked on a surface of the strip-shape flexible substrate by means of a film deposition apparatus provided in the film deposition portion. A temperature-raising portion 20 having a roller heater 21 is provided at least before the first of the film deposition portion 30, and the roller heater 21 is set to increase a temperature of the strip-shape flexible substrate 1 to approximately a temperature of the film deposition portion 30.
摘要翻译： 本发明提供一种薄膜层叠体的制造装置，其能够通过皱纹平滑化来减薄薄膜层叠构件的折痕，热皱纹和张力褶皱而提高其质量。 用于制造薄膜层叠构件的装置沿着带状柔性基板的宽度方向作为垂直方向在水平方向上输送带状柔性基板。 带状柔性基板被输送到设置在带状柔性基板的输送路径中的成膜部。 薄膜通过设在薄膜沉积部分中的薄膜沉积装置堆叠在带状柔性基板的表面上。 具有辊加热器21的升温部20至少在成膜部30的第一面之前设置，并且辊加热器21被设定为将带状柔性基板1的温度升高到 膜沉积部分30。
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公开(公告)号：US20120160165A1
公开(公告)日：2012-06-28
申请号：US13388609
申请日：2010-08-04
CPC分类号： C23C14/562 , B65H23/0324 , B65H23/038 , B65H23/195 , B65H23/26 , B65H2301/323 , B65H2301/51145
摘要： An apparatus for manufacturing a thin-film laminate prevents loosening of a strip-shaped flexible substrate at the time of conveying or misalignment of the strip-shaped flexible substrate with respect to a winding roller at the time of winding. In the apparatus, a strip-shaped flexible substrate in a lateral direction is conveyed by positioning longitudinally the width direction of the strip-shaped flexible substrate wound in a roll shape. The apparatus includes a deposition device having a deposition chamber for forming a thin film on the strip-shaped flexible substrate, a winding roll for winding a thin-film laminate, and an adjustment roller to prevent a loosening or misalignment of the strip-shaped flexible substrate between a pair of grip rollers and the winding roll, and the pair of grip rollers arranged in front of the adjustment roller to convey the thin-film laminate while maintaining a given height.
摘要翻译： 薄膜层叠体的制造装置能够防止在卷绕时带状柔性基板相对于卷绕辊的输送或未对准时的条状柔性基板的松动。 在该装置中，横向方向上的带状柔性基板通过纵向定位卷绕成卷状的带状柔性基板的宽度方向而传送。 该装置包括具有用于在带状柔性基板上形成薄膜的沉积室的沉积装置，用于卷绕薄膜层叠体的卷绕辊和调节辊，以防止带状柔性基板的松动或未对准 一对夹持辊和卷绕辊之间的基板，以及布置在调节辊前面的一对夹持辊，以在保持给定高度的同时传送薄膜层压体。
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公开(公告)号：US20120291958A1
公开(公告)日：2012-11-22
申请号：US13381051
申请日：2010-12-21
申请人： Takanori Yamada , Shoji Yokoyama
发明人： Takanori Yamada , Shoji Yokoyama
CPC分类号： B29C66/95 , B29C66/90 , C23C14/562 , C23C16/545 , H01L21/67259 , H01L21/67706 , H01L21/67721 , H01L21/6776 , H01L31/206 , Y02E10/50 , Y02P70/521 , Y10T156/17 , Y10T156/1741
摘要： Provided is a position controller for a flexible substrate (100) provided in a processing apparatus conveying a band-shaped flexible substrate (1) in a longitudinal position, in the lateral direction and processing the substrate in a processing unit (20) installed on a conveying path of the substrate. The position controller for the flexible substrate includes a pair of sandwiching rollers (131 and 132) that sandwiches an upper edge of the substrate; a supporting mechanism (140) that supports the pair of sandwiching rollers so as to be rotatable and movable close to or away from each other; an urging device (150) that applies a pressing force to the pair of sandwiching rollers through the supporting mechanism; and a pressing force adjusting device (160) adjusting the pressing force from the urging device, wherein each roller constituting the pair of sandwiching rollers is a conical roller having a circumferential surface inclined with respect to the axial direction, and is supported to the supporting mechanism so that a small diameter side of each conical roller is located at a center side of the substrate in the lateral direction and the rotation direction of a sandwiching surface of the substrate is the same as the conveying direction of the substrate.
摘要翻译： 提供了一种用于柔性基板（100）的位置控制器，该柔性基板设置在沿横向方向沿纵向位置传送带状柔性基板（1）的处理设备中，并且在处理单元（20）中处理基板，所述处理单元（20）安装在 衬底的输送路径。 用于柔性基板的位置控制器包括夹持基板的上边缘的一对夹持辊（131和132） 支撑机构（140），其支撑所述一对夹持辊以能够彼此靠近或远离地旋转和移动; 推动装置（150），其通过所述支撑机构对所述一对夹持辊施加按压力; 以及调整来自推动装置的按压力的按压力调节装置（160），其中构成所述一对夹持辊的每个辊是具有相对于轴向倾斜的周向表面的圆锥形辊，并且支撑在支撑机构 使得每个圆锥形辊的小直径侧在横向方向上位于基板的中心侧，并且基板的夹持表面的旋转方向与基板的输送方向相同。
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公开(公告)号：US20110240225A1
公开(公告)日：2011-10-06
申请号：US12737950
申请日：2009-12-17
申请人： Takanori Yamada , Shoji Yokoyama , Hidekazu Funo , Yuji Tsukahara
发明人： Takanori Yamada , Shoji Yokoyama , Hidekazu Funo , Yuji Tsukahara
CPC分类号： B65H23/038 , B65H23/0322 , B65H2301/3113 , B65H2301/323 , B65H2301/51145 , B65H2404/15212 , B65H2601/2532 , B65H2701/1752 , C23C14/562 , C23C16/545 , H01L21/67132 , H01L21/67706 , H01L21/67721 , H01L21/68 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： A position control device (21, 5) that controls a widthwise position of a flexible substrate 1 includes: a pair of upper nip rollers 21 (24, 25) that nip an upper edge portion of the flexible substrate, rotating shafts of the pair of upper nip rollers being inclined so that a rotation direction in a nipping portion thereof faces obliquely upward at a slight bias angle (α) with respect to a conveying direction of the flexible substrate; an upper support mechanism including a movable support member 26 and a fixed support member 27 that support the pair of upper nip rollers so that the pair of upper nip rollers can be rotated and brought close to, or withdrawn from each other; a spring 51 that biases, via the movable support member, one upper nip roller 25 of the pair of upper nip rollers in a direction of pressing against the other upper nip roller 24 of the pair of upper nip rollers; and drive means (56) for displacing the biasing member so as to adjust a nipping pressure of the pair of upper nip rollers. Occurrence of sagging and wrinkling of the flexible substrate can be inhibited, even when the strip-like flexible substrate is conveyed over a long distance, and a constant widthwise position of the flexible substrate can be maintained, thereby ensuring high-quality treatment.
摘要翻译： 控制柔性基板1的横向位置的位置控制装置（21,5）包括：一对夹持柔性基板的上边缘部分的上夹持辊21（24,25），该一对上转辊 上夹辊倾斜，使得其夹持部分中的旋转方向相对于柔性基板的传送方向以稍微偏斜角（α）倾斜向上; 上部支撑机构包括可移动支撑构件26和固定支撑构件27，所述支撑构件支撑所述一对上部夹持辊，使得所述一对上部夹持辊可以旋转并彼此靠近或退出; 弹簧51通过可移动的支撑构件沿一对上部夹持辊的另一个上部夹持辊24的方向偏压一对上夹持辊的一个上部夹持辊25; 以及驱动装置（56），用于移动偏置构件，以调节一对上夹持辊的夹压。 即使当带状柔性基板长距离地输送时，也能够抑制柔性基板的下垂和起皱的发生，能够维持柔性基板的宽度方向不变的位置，从而确保高质量的处理。
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公开(公告)号：US08746309B2
公开(公告)日：2014-06-10
申请号：US13381051
申请日：2010-12-21
申请人： Takanori Yamada , Shoji Yokoyama
发明人： Takanori Yamada , Shoji Yokoyama
CPC分类号： B29C66/95 , B29C66/90 , C23C14/562 , C23C16/545 , H01L21/67259 , H01L21/67706 , H01L21/67721 , H01L21/6776 , H01L31/206 , Y02E10/50 , Y02P70/521 , Y10T156/17 , Y10T156/1741
摘要： Provided is a position controller for a flexible substrate (100) provided in a processing apparatus conveying a band-shaped flexible substrate (1) in a longitudinal position, in the lateral direction and processing the substrate in a processing unit (20) installed on a conveying path of the substrate. The position controller for the flexible substrate includes a pair of sandwiching rollers (131 and 132) that sandwiches an upper edge of the substrate; a supporting mechanism (140) that supports the pair of sandwiching rollers so as to be rotatable and movable close to or away from each other; an urging device (150) that applies a pressing force to the pair of sandwiching rollers through the supporting mechanism; and a pressing force adjusting device (160) adjusting the pressing force from the urging device, wherein each roller constituting the pair of sandwiching rollers is a conical roller having a circumferential surface inclined with respect to the axial direction, and is supported to the supporting mechanism so that a small diameter side of each conical roller is located at a center side of the substrate in the lateral direction and the rotation direction of a sandwiching surface of the substrate is the same as the conveying direction of the substrate.
摘要翻译： 提供了一种用于柔性基板（100）的位置控制器，该柔性基板设置在沿横向方向沿纵向位置传送带状柔性基板（1）的处理设备中，并且在处理单元（20）中处理基板，所述处理单元（20）安装在 衬底的输送路径。 用于柔性基板的位置控制器包括夹持基板的上边缘的一对夹持辊（131和132） 支撑机构（140），其支撑所述一对夹持辊以能够彼此靠近或远离地旋转和移动; 推动装置（150），其通过所述支撑机构对所述一对夹持辊施加按压力; 以及调整来自推动装置的按压力的按压力调节装置（160），其中构成所述一对夹持辊的每个辊是具有相对于轴向倾斜的周向表面的圆锥形辊，并且支撑在支撑机构 使得每个圆锥形辊的小直径侧在横向方向上位于基板的中心侧，并且基板的夹持表面的旋转方向与基板的输送方向相同。
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公开(公告)号：US20120031565A1
公开(公告)日：2012-02-09
申请号：US13146908
申请日：2010-01-08
申请人： Shoji Yokoyama , Takanori Yamada , Takenori Wada
发明人： Shoji Yokoyama , Takanori Yamada , Takenori Wada
CPC分类号： B65H20/02 , B65H23/038 , B65H2301/321 , B65H2301/323 , B65H2301/325 , B65H2403/942 , B65H2404/144 , B65H2404/1451 , C23C14/562 , C23C16/545 , H01L21/67712 , H01L21/67721 , H01L21/6776 , H01L31/0392 , H01L31/03926 , H01L31/206 , Y02E10/50 , Y02P70/521 , Y10T156/17
摘要： A flexible substrate position control device in a processing device, which transports a flexible substrate in a horizontal direction and in a vertical orientation and carries out processing of the substrate by processing units installed in a transport path of the substrate, is provided with a pair of clamping rollers that clamp an upper edge of the substrate, a support mechanism that rotatably supports the pair of clamping rollers, urging means for applying pressing force to the pair of clamping rollers, and adjusting means for adjusting the pressing force applied by the urging means. The pair of clamping rollers has an inclination, in which the direction of pressing relative to the clamping surface of the substrate is towards the edge of the substrate in the width direction, and is supported such that the rotating direction at the clamping surface is the same direction as the transport direction of the substrate.
摘要翻译： 处理装置中的柔性基板位置控制装置，其在水平方向和垂直方向上输送柔性基板，并且通过安装在基板的输送路径中的处理单元进行基板的处理，设置有一对 夹紧基板的上边缘的夹紧辊，可旋转地支撑该对夹紧辊的支撑机构，用于向一对夹紧辊施加压力的推动装置，以及用于调节由推动装置施加的按压力的调节装置。 一对夹持辊具有倾斜，其中相对于基板的夹紧表面的压制方向在宽度方向上朝向基板的边缘，并且被支撑成使得夹紧表面处的旋转方向相同 方向作为基板的输送方向。
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