Invention Application
US20120164773A1 METHOD FOR FABRICATING SEMICONDUCTOR LIGHTING CHIP 失效
制造半导体照明芯片的方法

METHOD FOR FABRICATING SEMICONDUCTOR LIGHTING CHIP
Abstract:
A method for fabricating a semiconductor lighting chip includes steps of: providing a substrate; forming a first etching layer on the substrate; forming a connecting layer on the first etching layer; forming a second etching layer on the connecting layer; forming a lighting structure on the second etching layer; and etching the first etching layer, the connecting layer, the second etching layer and the lighting structure, wherein an etching rate of the first etching layer and the second etching layer is lager than that of the connecting layer and the lighting structure, thereby to form the connecting layer and the lighting structure each with an inverted frustum-shaped structure.
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