Invention Application
- Patent Title: METHOD FOR FABRICATING SEMICONDUCTOR LIGHTING CHIP
- Patent Title (中): 制造半导体照明芯片的方法
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Application No.: US13216260Application Date: 2011-08-24
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Publication No.: US20120164773A1Publication Date: 2012-06-28
- Inventor: PO-MIN TU , SHIH-CHENG HUANG , TZU-CHIEN HUNG , YA-WEN LIN
- Applicant: PO-MIN TU , SHIH-CHENG HUANG , TZU-CHIEN HUNG , YA-WEN LIN
- Applicant Address: TW Hsinchu Hsien
- Assignee: ADVANCED OPTOELECTRONIC TECHNOLOGY, INC.
- Current Assignee: ADVANCED OPTOELECTRONIC TECHNOLOGY, INC.
- Current Assignee Address: TW Hsinchu Hsien
- Priority: CN201010606544.4 20101228
- Main IPC: H01L33/06
- IPC: H01L33/06

Abstract:
A method for fabricating a semiconductor lighting chip includes steps of: providing a substrate; forming a first etching layer on the substrate; forming a connecting layer on the first etching layer; forming a second etching layer on the connecting layer; forming a lighting structure on the second etching layer; and etching the first etching layer, the connecting layer, the second etching layer and the lighting structure, wherein an etching rate of the first etching layer and the second etching layer is lager than that of the connecting layer and the lighting structure, thereby to form the connecting layer and the lighting structure each with an inverted frustum-shaped structure.
Public/Granted literature
- US08513039B2 Method for fabricating semiconductor lighting chip Public/Granted day:2013-08-20
Information query
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