发明申请
US20120181170A1 WAFER ELECTROPLATING APPARATUS FOR REDUCING EDGE DEFECTS 审中-公开
用于减少边缘缺陷的WAFER电镀设备

WAFER ELECTROPLATING APPARATUS FOR REDUCING EDGE DEFECTS
摘要:
Methods, apparatuses, and various apparatus components, such as base plates, lipseals, and contact ring assemblies are provided for reducing contamination of the contact area in the apparatuses. Contamination may happen during removal of semiconductor wafers from apparatuses after the electroplating process. In certain embodiments, a base plate with a hydrophobic coating, such as polyamide-imide (PAI) and sometimes polytetrafluoroethylene (PTFE), are used. Further, contact tips of the contact ring assembly may be positioned further away from the sealing lip of the lipseal. In certain embodiments, a portion of the contact ring assembly and/or the lipseal also include hydrophobic coatings.
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