发明申请
- 专利标题: Magnetic Tunnel Junction for MRAM applications
- 专利标题(中): MRAM应用的磁隧道结
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申请号: US12930877申请日: 2011-01-19
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公开(公告)号: US20120181537A1公开(公告)日: 2012-07-19
- 发明人: Wei Cao , Cheng T. Horng , Witold Kula , Chyu Jiuh Torng
- 申请人: Wei Cao , Cheng T. Horng , Witold Kula , Chyu Jiuh Torng
- 专利权人: MagIC Technologies Inc.
- 当前专利权人: MagIC Technologies Inc.
- 主分类号: H01L29/82
- IPC分类号: H01L29/82 ; H01L21/36 ; H01L29/04
摘要:
A MTJ in an MRAM array is disclosed with a composite free layer having a lower crystalline layer contacting a tunnel barrier and an upper amorphous NiFeX layer for improved bit switching performance. The crystalline layer is Fe, Ni, or FeB with a thickness of at least 6 Angstroms which affords a high magnetoresistive ratio. The X element in the NiFeX layer is Mg, Hf, Zr, Nb, or Ta with a content of 5 to 30 atomic %. NiFeX thickness is preferably between 20 to 40 Angstroms to substantially reduce bit line switching current and number of shorted bits. In an alternative embodiment, the crystalline layer may be a Fe/NiFe bilayer. Optionally, the amorphous layer may have a NiFeM1/NiFeM2 configuration where M1 and M2 are Mg, Hf, Zr, Nb, or Ta, and M1 is unequal to M2. Annealing at 300° C. to 360° C. provides a high magnetoresistive ratio of about 150%.
公开/授权文献
- US08786036B2 Magnetic tunnel junction for MRAM applications 公开/授权日:2014-07-22
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