发明申请
- 专利标题： FRAME CELL FOR SHOT LAYOUT FLEXIBILITY
- 专利标题（中）： 用于拍摄布局灵活性的框架单元
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申请号： US13409517申请日： 2012-03-01
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公开(公告)号： US20120181669A1公开(公告)日： 2012-07-19
- 发明人: Chin-Ming LIN , Chia-hung Huang , Chi-Ming Yang , Chin-Hsiang Lin , Yung-Cheng Chen , Chih-Wei Lin
- 申请人： Chin-Ming LIN , Chia-hung Huang , Chi-Ming Yang , Chin-Hsiang Lin , Yung-Cheng Chen , Chih-Wei Lin
- 申请人地址： TW Hsin-Chu
- 专利权人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址： TW Hsin-Chu
- 主分类号： H01L23/544
- IPC分类号： H01L23/544 ; G06F17/50
摘要：
A method includes establishing an initial shot layout in which a number of shots are arranged in vertically aligned columns and horizontally aligned rows to cover a semiconductor wafer. At least one of a row of shots or a column of shots is shifted relative to an adjacent row or column of shots to establish at least one additional shot layout that differs from the initial shot layout in that shots in the at least one shifted row or column of shots are not aligned with the shots in the adjacent row or column of shots with which they were aligned in the initial shot layout. One of the initial shot layout and the at least one additional shot layout is selected as a final shot layout. The wafer is exposed to light using the final shot layout.
公开/授权文献
- US08843860B2 Frame cell for shot layout flexibility 公开/授权日：2014-09-23
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