发明申请
- 专利标题: Optimal Leg Design for MEMS Resonator
- 专利标题(中): MEMS谐振器的最佳腿设计
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申请号: US13150442申请日: 2011-06-01
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公开(公告)号: US20120188023A1公开(公告)日: 2012-07-26
- 发明人: Xavier Rottenberg , Roelof Jansen , Steve Stoffels , Hendrikus Tilmans
- 申请人: Xavier Rottenberg , Roelof Jansen , Steve Stoffels , Hendrikus Tilmans
- 申请人地址: BE Leuven
- 专利权人: IMEC
- 当前专利权人: IMEC
- 当前专利权人地址: BE Leuven
- 主分类号: H03B5/30
- IPC分类号: H03B5/30
摘要:
A microelectromechanical (MEMS) resonator is disclosed that comprises a substrate and a resonator body suspended above the substrate by means of clamped-clamped beams, where each beam comprises two support legs with a common connection to the resonator body, and the resonator body is configured to resonate at an operating frequency. The MEMS resonator further comprises an excitation component configured to excite the resonator body to resonate at the operating frequency, where each beam is further configured to oscillate in a flexural mode at a flexural wavelength as a result of resonating at the operating frequency, and each leg is acoustically long with respect to the flexural wavelength.
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