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公开(公告)号：US20120188023A1
公开(公告)日：2012-07-26
申请号：US13150442
申请日：2011-06-01
IPC分类号： H03B5/30
CPC分类号： H03H9/02338 , H03H2009/0244 , H03H2009/02496
摘要： A microelectromechanical (MEMS) resonator is disclosed that comprises a substrate and a resonator body suspended above the substrate by means of clamped-clamped beams, where each beam comprises two support legs with a common connection to the resonator body, and the resonator body is configured to resonate at an operating frequency. The MEMS resonator further comprises an excitation component configured to excite the resonator body to resonate at the operating frequency, where each beam is further configured to oscillate in a flexural mode at a flexural wavelength as a result of resonating at the operating frequency, and each leg is acoustically long with respect to the flexural wavelength.
摘要翻译： 公开了一种微机电（MEMS）谐振器，其包括基板和谐振器体，该谐振器主体借助于夹紧的夹持梁悬挂在基板之上，其中每个梁包括两个与谐振器主体共同连接的支撑腿，并且谐振器本体被配置 以工作频率共鸣。 MEMS谐振器还包括激励部件，其被配置为激励谐振器主体以工作频率谐振，其中每个光束进一步配置为在弯曲波长下以弯曲波长振荡，作为在工作频率下谐振的结果，并且每个支腿 相对于弯曲波长在声学上长。
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公开(公告)号：US20110210801A1
公开(公告)日：2011-09-01
申请号：US13033932
申请日：2011-02-24
IPC分类号： H03B5/30
CPC分类号： H03H9/2463 , G01K7/32 , H03H9/02377 , H03H2009/02496
摘要： A micromechanical resonator device and a method for measuring a temperature are disclosed. In one aspect, the device has a resonator body, an excitation module, a control module, and a frequency detection module. The resonator body is adapted to resonate separately in at least a first and a second predetermined resonance state, selected by applying a different bias, the states being of the same eigenmode but having a different resonance frequency, each resonance frequency having a different temperature dependence. The micromechanical resonator device may have a passive temperature compensated resonance frequency.
摘要翻译： 公开了一种微机械谐振器装置和用于测量温度的方法。 一方面，该装置具有谐振器本体，激励模块，控制模块和频率检测模块。 谐振器体适于以至少第一和第二预定谐振状态分别谐振，通过施加不同的偏压来选择，状态具有相同的本征模，但是具有不同的谐振频率，每个谐振频率具有不同的温度依赖性。 微机械谐振器装置可以具有无源温度补偿谐振频率。
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