发明申请
- 专利标题: RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- 专利标题(中): 耐蚀组合物和形成耐力图案的方法
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申请号: US13343481申请日: 2012-01-04
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公开(公告)号: US20120196226A1公开(公告)日: 2012-08-02
- 发明人: Shinji Kumada , Satoshi Maemori , Masatoshi Arai , Daiju Shiono
- 申请人: Shinji Kumada , Satoshi Maemori , Masatoshi Arai , Daiju Shiono
- 申请人地址: JP Kawasaki-shi
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2011-014447 20110126; JP2011-240487 20111101
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/004
摘要:
A resist composition including a base component (A), which exhibits changed solubility in a developing solution under the action of acid and can be used in a lithography process that employs light having a wavelength of 193 nm or less as the exposure light source, an acid generator component (B) which generates acid upon exposure, and a polymeric compound (C) having a structural unit (c0) represented by general formula (c0) shown below, wherein the amount of the polymeric compound (C) is less than 25 parts by mass relative to 100 parts by mass of the base component (A). In the formula, R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, and R1 represents an organic group having one or more primary or secondary alcoholic hydroxyl groups, or a chain-like tertiary alcoholic hydroxyl group.
公开/授权文献
- US09012125B2 Resist composition and method of forming resist pattern 公开/授权日:2015-04-21
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