发明申请
US20120198918A1 MICROELECTROMECHANICAL SYSTEMS TYPE SEMICONDUCTOR GAS SENSOR USING MICROHEATER HAVING MANY HOLES AND METHOD FOR MANUFACTURING THE SAME
有权
微电子系统系统类型半导体气体传感器使用具有多个孔的微波炉及其制造方法
- 专利标题： MICROELECTROMECHANICAL SYSTEMS TYPE SEMICONDUCTOR GAS SENSOR USING MICROHEATER HAVING MANY HOLES AND METHOD FOR MANUFACTURING THE SAME
- 专利标题（中）： 微电子系统系统类型半导体气体传感器使用具有多个孔的微波炉及其制造方法
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申请号： US13345772申请日： 2012-01-09
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公开(公告)号： US20120198918A1公开(公告)日： 2012-08-09
- 发明人: Seung Eon MOON , Jae Woo LEE , Nak Jin CHOI , Hyung Kun LEE , Woo Seok YANG , Jong Dae KIM
- 申请人： Seung Eon MOON , Jae Woo LEE , Nak Jin CHOI , Hyung Kun LEE , Woo Seok YANG , Jong Dae KIM
- 申请人地址： KR Daejeon
- 专利权人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人地址： KR Daejeon
- 优先权： KR10-2011-0011436 20110209; KR10-2011-0068818 20110712
- 主分类号： G01N27/04
- IPC分类号： G01N27/04 ; H01L21/02
摘要：
Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.