摘要:
Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.
摘要:
A method for fabricating an acoustic sensor according to an exemplary embodiment of the present disclosure includes: forming an acoustic sensor unit by forming a lower electrode on an upper portion of a substrate, forming etching holes on the lower electrode, forming a sacrifice layer on an upper portion of the lower electrode, and coupling a diaphragm to an upper portion of the sacrifice layer; coupling a lower portion of the substrate of the acoustic sensor unit to a printed circuit board on which a sound pressure input hole is formed so as to expose the lower portion of the substrate of the acoustic sensor unit to the outside through the sound pressure input hole; attaching a cover covering the acoustic sensor unit on the printed circuit board; etching the substrate of the acoustic sensor unit to form an acoustic chamber; and removing the sacrifice layer.
摘要:
Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.
摘要:
Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.
摘要:
A condenser-type acoustic sensor is provided. The acoustic sensor includes an acoustic chamber formed by etching an upper portion of a substrate, an insulating layer formed on the substrate and having a central area etched so that the acoustic chamber is exposed, a diaphragm formed on the insulating layer, and a stationary electrode formed on the diaphragm. Thus, a nonlinear component resulting from horizontal movement of the support and the diaphragm is removed to improve a sound-pressure response characteristic, and a substrate backside process can be omitted to simplify a fabrication process and improve a yield.
摘要:
A wall-mounted drum washing machine includes: a rear panel mounted on a wall; a tub supported by the rear panel and containing washing water; a front panel having an opening formed therein and installed on the tub; a drum rotatably installed in the tub; a driving unit configured to providing power to the drum; a cover installed on the rear panel and covering the tub and the front panel; a water supply device supplying washing water to the tub; a drain device discharging washing water from the tub to the outside; and a ventilation device forming a flow path through which air is moved between the inside and outside of the tub and connected to the drain device so as to discharge bubbles introduced from the tub to the outside through the drain device.
摘要:
Disclosed herein are a loom for weaving a fabric with two types of tissue, a shoe upper woven using the loom, and a shoe including such a shoe upper. The loom includes a first heddle stack formed by arranging a plurality of first heddles in one or more rows, and a second heddle stack formed by arranging a plurality of second heddles in one or more rows, the second heddles being different in kind from the first heddles. The first heddle stack and the second heddle stack are sequentially arranged in a warp feeding direction.
摘要:
A posture correcting device is provided. The posture correcting device includes: armpit rests bent forward to support both armpits of a user; vertical rods each of which extends downward from each of the armpit rests; and lower clothing supports each of which is formed at the lowermost end of each of the vertical rods and fixed to a lower clothing piece of the user.